JPS55110042A - Electron beam diagram projector - Google Patents

Electron beam diagram projector

Info

Publication number
JPS55110042A
JPS55110042A JP1617979A JP1617979A JPS55110042A JP S55110042 A JPS55110042 A JP S55110042A JP 1617979 A JP1617979 A JP 1617979A JP 1617979 A JP1617979 A JP 1617979A JP S55110042 A JPS55110042 A JP S55110042A
Authority
JP
Japan
Prior art keywords
electron beam
deflection
lens
mask
flux
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1617979A
Other languages
Japanese (ja)
Inventor
Toshio Eto
Chikaichi Ito
Takayuki Asai
Masatoshi Utaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP1617979A priority Critical patent/JPS55110042A/en
Publication of JPS55110042A publication Critical patent/JPS55110042A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To obtain an effective projecting area free from deflection with high resolving power by a method wherein a dynamic converging lens system for setting an electron beam source image and a dynamic deflection system for deflecting electron beam flux are provided at the front focal point position of an irradiating lens constituting a projector. CONSTITUTION:Electron beam flux from an electron beam source is converged by a converging lens 3 while voltage is applied to an irradiating lens 5 via deflection systems 15 and 16, and the electron beam flux is projected to the surface of a mask 6. According to this constitution, the front focal point position 19' of the lens 5 is always made to conform to the deflection center 13 and the crossover image, letting an outer edge electron beam 22' approach a central electron beam 14, thus making the beam vertically incident upon the surface of a mask 6 as shown by 23'. For doing like this, the excitation of the lens 3 is corrected by synchronizing it with the transference of the deflection center, and the crossover image 4 is moved to the deflection center 13. By so doing, the electron beam flux is always kept vertically incident upon the surface of the mask, and the resolving power can be improved.
JP1617979A 1979-02-16 1979-02-16 Electron beam diagram projector Pending JPS55110042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1617979A JPS55110042A (en) 1979-02-16 1979-02-16 Electron beam diagram projector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1617979A JPS55110042A (en) 1979-02-16 1979-02-16 Electron beam diagram projector

Publications (1)

Publication Number Publication Date
JPS55110042A true JPS55110042A (en) 1980-08-25

Family

ID=11909277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1617979A Pending JPS55110042A (en) 1979-02-16 1979-02-16 Electron beam diagram projector

Country Status (1)

Country Link
JP (1) JPS55110042A (en)

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