JPS55109169U - - Google Patents
Info
- Publication number
- JPS55109169U JPS55109169U JP859879U JP859879U JPS55109169U JP S55109169 U JPS55109169 U JP S55109169U JP 859879 U JP859879 U JP 859879U JP 859879 U JP859879 U JP 859879U JP S55109169 U JPS55109169 U JP S55109169U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sliding Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP859879U JPS5918210Y2 (ja) | 1979-01-26 | 1979-01-26 | 気密バルブ保護装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP859879U JPS5918210Y2 (ja) | 1979-01-26 | 1979-01-26 | 気密バルブ保護装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55109169U true JPS55109169U (ja) | 1980-07-31 |
| JPS5918210Y2 JPS5918210Y2 (ja) | 1984-05-26 |
Family
ID=28817920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP859879U Expired JPS5918210Y2 (ja) | 1979-01-26 | 1979-01-26 | 気密バルブ保護装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5918210Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007066537A1 (ja) * | 2005-12-05 | 2007-06-14 | Ulvac, Inc. | 真空装置用仕切りバルブ |
-
1979
- 1979-01-26 JP JP859879U patent/JPS5918210Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007066537A1 (ja) * | 2005-12-05 | 2007-06-14 | Ulvac, Inc. | 真空装置用仕切りバルブ |
| JPWO2007066537A1 (ja) * | 2005-12-05 | 2009-05-14 | 株式会社アルバック | 真空装置用仕切りバルブ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5918210Y2 (ja) | 1984-05-26 |