JPS55103410A - Cantilever-type displacement converter - Google Patents
Cantilever-type displacement converterInfo
- Publication number
- JPS55103410A JPS55103410A JP1043379A JP1043379A JPS55103410A JP S55103410 A JPS55103410 A JP S55103410A JP 1043379 A JP1043379 A JP 1043379A JP 1043379 A JP1043379 A JP 1043379A JP S55103410 A JPS55103410 A JP S55103410A
- Authority
- JP
- Japan
- Prior art keywords
- sensitivity
- cantilever
- chips
- gauges
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
PURPOSE: To realize the excellent temperature properties for the strain gauge of the cantiliver-type displacement converter by forming the gauge into such crystal direction that secures the sensitivity to the stress in the longer direction of the cantilever and no sensitivity to the lateral stress each.
CONSTITUTION: The Si chips 3 and 3' are adhered to small thickness part 2 of cantilever 1, and lever 1 is fixed to case body 6 through fixing part 5. Four units of diffusion gauges 31, 32, 31' and 32' (31' and 32' are located at the back of 31 and 32 each on the drawing) in chips 3 and 3' are connected to the Wheatstone bridge in order to secure increment of sensitivity as well as the temperature compensation. And if the longer directions of gauges 31 and 32 are set toward axis <111>, the piezo-resistance coefficient becomes maximum. Thus the diffusion is given toward the axis, and as a result the force (or displacement) to be applied to power point 4 can be detected with the heighest sensitivity and in the form of the resistance change of the gauses 31 and 32 each.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1043379A JPS55103410A (en) | 1979-02-02 | 1979-02-02 | Cantilever-type displacement converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1043379A JPS55103410A (en) | 1979-02-02 | 1979-02-02 | Cantilever-type displacement converter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55103410A true JPS55103410A (en) | 1980-08-07 |
Family
ID=11750014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1043379A Pending JPS55103410A (en) | 1979-02-02 | 1979-02-02 | Cantilever-type displacement converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55103410A (en) |
-
1979
- 1979-02-02 JP JP1043379A patent/JPS55103410A/en active Pending
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