JPS55103410A - Cantilever-type displacement converter - Google Patents

Cantilever-type displacement converter

Info

Publication number
JPS55103410A
JPS55103410A JP1043379A JP1043379A JPS55103410A JP S55103410 A JPS55103410 A JP S55103410A JP 1043379 A JP1043379 A JP 1043379A JP 1043379 A JP1043379 A JP 1043379A JP S55103410 A JPS55103410 A JP S55103410A
Authority
JP
Japan
Prior art keywords
sensitivity
cantilever
chips
gauges
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1043379A
Other languages
Japanese (ja)
Inventor
Satoshi Shimada
Masanori Tanabe
Kazuji Yamada
Motohisa Nishihara
Yoshitaka Matsuoka
Takeo Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1043379A priority Critical patent/JPS55103410A/en
Publication of JPS55103410A publication Critical patent/JPS55103410A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To realize the excellent temperature properties for the strain gauge of the cantiliver-type displacement converter by forming the gauge into such crystal direction that secures the sensitivity to the stress in the longer direction of the cantilever and no sensitivity to the lateral stress each.
CONSTITUTION: The Si chips 3 and 3' are adhered to small thickness part 2 of cantilever 1, and lever 1 is fixed to case body 6 through fixing part 5. Four units of diffusion gauges 31, 32, 31' and 32' (31' and 32' are located at the back of 31 and 32 each on the drawing) in chips 3 and 3' are connected to the Wheatstone bridge in order to secure increment of sensitivity as well as the temperature compensation. And if the longer directions of gauges 31 and 32 are set toward axis <111>, the piezo-resistance coefficient becomes maximum. Thus the diffusion is given toward the axis, and as a result the force (or displacement) to be applied to power point 4 can be detected with the heighest sensitivity and in the form of the resistance change of the gauses 31 and 32 each.
COPYRIGHT: (C)1980,JPO&Japio
JP1043379A 1979-02-02 1979-02-02 Cantilever-type displacement converter Pending JPS55103410A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1043379A JPS55103410A (en) 1979-02-02 1979-02-02 Cantilever-type displacement converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1043379A JPS55103410A (en) 1979-02-02 1979-02-02 Cantilever-type displacement converter

Publications (1)

Publication Number Publication Date
JPS55103410A true JPS55103410A (en) 1980-08-07

Family

ID=11750014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1043379A Pending JPS55103410A (en) 1979-02-02 1979-02-02 Cantilever-type displacement converter

Country Status (1)

Country Link
JP (1) JPS55103410A (en)

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