JPS55102470A - Hardening of photosensitive resin layer - Google Patents
Hardening of photosensitive resin layerInfo
- Publication number
- JPS55102470A JPS55102470A JP964479A JP964479A JPS55102470A JP S55102470 A JPS55102470 A JP S55102470A JP 964479 A JP964479 A JP 964479A JP 964479 A JP964479 A JP 964479A JP S55102470 A JPS55102470 A JP S55102470A
- Authority
- JP
- Japan
- Prior art keywords
- hardened
- discharge lamp
- photosensitive resin
- hardening
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polymerisation Methods In General (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP964479A JPS55102470A (en) | 1979-02-01 | 1979-02-01 | Hardening of photosensitive resin layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP964479A JPS55102470A (en) | 1979-02-01 | 1979-02-01 | Hardening of photosensitive resin layer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55102470A true JPS55102470A (en) | 1980-08-05 |
JPS6112503B2 JPS6112503B2 (ja) | 1986-04-08 |
Family
ID=11725919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP964479A Granted JPS55102470A (en) | 1979-02-01 | 1979-02-01 | Hardening of photosensitive resin layer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55102470A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4548688A (en) * | 1983-05-23 | 1985-10-22 | Fusion Semiconductor Systems | Hardening of photoresist |
-
1979
- 1979-02-01 JP JP964479A patent/JPS55102470A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4548688A (en) * | 1983-05-23 | 1985-10-22 | Fusion Semiconductor Systems | Hardening of photoresist |
Also Published As
Publication number | Publication date |
---|---|
JPS6112503B2 (ja) | 1986-04-08 |
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