JPS55102009A - Deceleration instructing method in positioning control - Google Patents

Deceleration instructing method in positioning control

Info

Publication number
JPS55102009A
JPS55102009A JP397679A JP397679A JPS55102009A JP S55102009 A JPS55102009 A JP S55102009A JP 397679 A JP397679 A JP 397679A JP 397679 A JP397679 A JP 397679A JP S55102009 A JPS55102009 A JP S55102009A
Authority
JP
Japan
Prior art keywords
detector
deceleration
moving
positioning
moving distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP397679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6235126B2 (enrdf_load_stackoverflow
Inventor
Shinji Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Manufacturing Co Ltd filed Critical Yaskawa Electric Manufacturing Co Ltd
Priority to JP397679A priority Critical patent/JPS55102009A/ja
Publication of JPS55102009A publication Critical patent/JPS55102009A/ja
Publication of JPS6235126B2 publication Critical patent/JPS6235126B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP397679A 1979-01-19 1979-01-19 Deceleration instructing method in positioning control Granted JPS55102009A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP397679A JPS55102009A (en) 1979-01-19 1979-01-19 Deceleration instructing method in positioning control

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP397679A JPS55102009A (en) 1979-01-19 1979-01-19 Deceleration instructing method in positioning control

Publications (2)

Publication Number Publication Date
JPS55102009A true JPS55102009A (en) 1980-08-04
JPS6235126B2 JPS6235126B2 (enrdf_load_stackoverflow) 1987-07-30

Family

ID=11572079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP397679A Granted JPS55102009A (en) 1979-01-19 1979-01-19 Deceleration instructing method in positioning control

Country Status (1)

Country Link
JP (1) JPS55102009A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57170525A (en) * 1981-04-14 1982-10-20 Nippon Telegr & Teleph Corp <Ntt> Positioning control system for alignment stage
JPS57206926A (en) * 1981-06-16 1982-12-18 Nippon Telegr & Teleph Corp <Ntt> Positioning method for stage
JPS62272308A (ja) * 1986-05-21 1987-11-26 Nippon Telegr & Teleph Corp <Ntt> フイ−ドフオワ−ド駆動信号発生方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49121533A (enrdf_load_stackoverflow) * 1973-03-22 1974-11-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49121533A (enrdf_load_stackoverflow) * 1973-03-22 1974-11-20

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57170525A (en) * 1981-04-14 1982-10-20 Nippon Telegr & Teleph Corp <Ntt> Positioning control system for alignment stage
JPS57206926A (en) * 1981-06-16 1982-12-18 Nippon Telegr & Teleph Corp <Ntt> Positioning method for stage
JPS62272308A (ja) * 1986-05-21 1987-11-26 Nippon Telegr & Teleph Corp <Ntt> フイ−ドフオワ−ド駆動信号発生方法

Also Published As

Publication number Publication date
JPS6235126B2 (enrdf_load_stackoverflow) 1987-07-30

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