JPS5494273A - Silicon monocrystal wafer - Google Patents

Silicon monocrystal wafer

Info

Publication number
JPS5494273A
JPS5494273A JP55478A JP55478A JPS5494273A JP S5494273 A JPS5494273 A JP S5494273A JP 55478 A JP55478 A JP 55478A JP 55478 A JP55478 A JP 55478A JP S5494273 A JPS5494273 A JP S5494273A
Authority
JP
Japan
Prior art keywords
silicon monocrystal
monocrystal wafer
wafer
silicon
monocrystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55478A
Other languages
Japanese (ja)
Inventor
Seigou Kishino
Tsuyoshi Kanamori
Naoji Suehiro
Yoshiaki Matsushita
Kazunori Tanitsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP55478A priority Critical patent/JPS5494273A/en
Publication of JPS5494273A publication Critical patent/JPS5494273A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP55478A 1978-01-09 1978-01-09 Silicon monocrystal wafer Pending JPS5494273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55478A JPS5494273A (en) 1978-01-09 1978-01-09 Silicon monocrystal wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55478A JPS5494273A (en) 1978-01-09 1978-01-09 Silicon monocrystal wafer

Publications (1)

Publication Number Publication Date
JPS5494273A true JPS5494273A (en) 1979-07-25

Family

ID=11476934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55478A Pending JPS5494273A (en) 1978-01-09 1978-01-09 Silicon monocrystal wafer

Country Status (1)

Country Link
JP (1) JPS5494273A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209729A (en) * 1988-02-18 1989-08-23 Sanyo Electric Co Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209729A (en) * 1988-02-18 1989-08-23 Sanyo Electric Co Ltd Manufacture of semiconductor device

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