JPS5493205A - Electrostatic diaphragm pump - Google Patents

Electrostatic diaphragm pump

Info

Publication number
JPS5493205A
JPS5493205A JP16019577A JP16019577A JPS5493205A JP S5493205 A JPS5493205 A JP S5493205A JP 16019577 A JP16019577 A JP 16019577A JP 16019577 A JP16019577 A JP 16019577A JP S5493205 A JPS5493205 A JP S5493205A
Authority
JP
Japan
Prior art keywords
diaphragm
port
discharge
opens
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16019577A
Other languages
English (en)
Inventor
Toshio Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP16019577A priority Critical patent/JPS5493205A/ja
Publication of JPS5493205A publication Critical patent/JPS5493205A/ja
Pending legal-status Critical Current

Links

JP16019577A 1977-12-30 1977-12-30 Electrostatic diaphragm pump Pending JPS5493205A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16019577A JPS5493205A (en) 1977-12-30 1977-12-30 Electrostatic diaphragm pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16019577A JPS5493205A (en) 1977-12-30 1977-12-30 Electrostatic diaphragm pump

Publications (1)

Publication Number Publication Date
JPS5493205A true JPS5493205A (en) 1979-07-24

Family

ID=15709860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16019577A Pending JPS5493205A (en) 1977-12-30 1977-12-30 Electrostatic diaphragm pump

Country Status (1)

Country Link
JP (1) JPS5493205A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6382078U (ja) * 1986-11-17 1988-05-30
JPH0370884A (ja) * 1989-08-07 1991-03-26 Internatl Business Mach Corp <Ibm> カスケード・コンプレッサ
JPH05502079A (ja) * 1990-02-27 1993-04-15 フラウンホファー―ゲゼルシャフト ツア フェルデルング デア アンゲバンテン フォルシュング アインゲトラゲナー フェライン 静電動作可能な超小形ポンプ
CN107339228A (zh) * 2017-06-26 2017-11-10 歌尔股份有限公司 微流泵浦结构、系统及制作方法
US20170342971A1 (en) * 2012-07-05 2017-11-30 Kci Licensing, Inc. Systems and methods for supplying reduced pressure using a disc pump with electrostatic actuation
JP2019529974A (ja) * 2016-09-01 2019-10-17 ラクラリー 静電気作動装置、及び、該静電気作動装置を備えた眼鏡

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6382078U (ja) * 1986-11-17 1988-05-30
JPH0370884A (ja) * 1989-08-07 1991-03-26 Internatl Business Mach Corp <Ibm> カスケード・コンプレッサ
JPH05502079A (ja) * 1990-02-27 1993-04-15 フラウンホファー―ゲゼルシャフト ツア フェルデルング デア アンゲバンテン フォルシュング アインゲトラゲナー フェライン 静電動作可能な超小形ポンプ
US20170342971A1 (en) * 2012-07-05 2017-11-30 Kci Licensing, Inc. Systems and methods for supplying reduced pressure using a disc pump with electrostatic actuation
US10294933B2 (en) * 2012-07-05 2019-05-21 Kci Licensing, Inc. Systems and methods for supplying reduced pressure using a disc pump with electrostatic actuation
US10502199B2 (en) 2012-07-05 2019-12-10 Kci Licensing, Inc. Systems and methods for supplying reduced pressure using a disc pump with electrostatic actuation
JP2019529974A (ja) * 2016-09-01 2019-10-17 ラクラリー 静電気作動装置、及び、該静電気作動装置を備えた眼鏡
JP2022111178A (ja) * 2016-09-01 2022-07-29 ラクラリー 静電気作動装置を備えた眼鏡
CN107339228A (zh) * 2017-06-26 2017-11-10 歌尔股份有限公司 微流泵浦结构、系统及制作方法

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