JPS5490000A - Manufacture of silicon nitride - Google Patents
Manufacture of silicon nitrideInfo
- Publication number
- JPS5490000A JPS5490000A JP15668277A JP15668277A JPS5490000A JP S5490000 A JPS5490000 A JP S5490000A JP 15668277 A JP15668277 A JP 15668277A JP 15668277 A JP15668277 A JP 15668277A JP S5490000 A JPS5490000 A JP S5490000A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- silicon nitride
- nitride
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0685—Preparation by carboreductive nitridation
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15668277A JPS5490000A (en) | 1977-12-27 | 1977-12-27 | Manufacture of silicon nitride |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15668277A JPS5490000A (en) | 1977-12-27 | 1977-12-27 | Manufacture of silicon nitride |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5490000A true JPS5490000A (en) | 1979-07-17 |
Family
ID=15633011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15668277A Pending JPS5490000A (en) | 1977-12-27 | 1977-12-27 | Manufacture of silicon nitride |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5490000A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63502823A (ja) * | 1986-03-14 | 1988-10-20 | コモンウェルス・サイエンティフィック・アンド・インダストリアル・リサーチ・オーガニゼイション | セラミック製品の製法 |
JPS6428210A (en) * | 1987-03-11 | 1989-01-30 | Agency Ind Science Techn | Production of ceramics from rice hull ash |
JPH01249614A (ja) * | 1988-03-30 | 1989-10-04 | Denki Kagaku Kogyo Kk | 籾殻及び籾殻灰からなる固型組成物ならびにその製造方法 |
EP1250982A2 (en) * | 2001-04-19 | 2002-10-23 | Minebea Co., Ltd. | Polishing-washing method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3855395A (en) * | 1972-09-06 | 1974-12-17 | Univ Utah | Production of silicon nitride from rice hulls |
JPS52798A (en) * | 1975-06-24 | 1977-01-06 | Denki Kagaku Kogyo Kk | Process for production of acteivated alumina |
-
1977
- 1977-12-27 JP JP15668277A patent/JPS5490000A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3855395A (en) * | 1972-09-06 | 1974-12-17 | Univ Utah | Production of silicon nitride from rice hulls |
JPS52798A (en) * | 1975-06-24 | 1977-01-06 | Denki Kagaku Kogyo Kk | Process for production of acteivated alumina |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63502823A (ja) * | 1986-03-14 | 1988-10-20 | コモンウェルス・サイエンティフィック・アンド・インダストリアル・リサーチ・オーガニゼイション | セラミック製品の製法 |
JPS6428210A (en) * | 1987-03-11 | 1989-01-30 | Agency Ind Science Techn | Production of ceramics from rice hull ash |
JPH01249614A (ja) * | 1988-03-30 | 1989-10-04 | Denki Kagaku Kogyo Kk | 籾殻及び籾殻灰からなる固型組成物ならびにその製造方法 |
EP1250982A2 (en) * | 2001-04-19 | 2002-10-23 | Minebea Co., Ltd. | Polishing-washing method |
EP1250982A3 (en) * | 2001-04-19 | 2002-12-04 | Minebea Co., Ltd. | Polishing-washing method |
US6783433B2 (en) | 2001-04-19 | 2004-08-31 | Minebea Co., Ltd. | Polishing-washing method |
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