JPS5489350U - - Google Patents
Info
- Publication number
- JPS5489350U JPS5489350U JP16329477U JP16329477U JPS5489350U JP S5489350 U JPS5489350 U JP S5489350U JP 16329477 U JP16329477 U JP 16329477U JP 16329477 U JP16329477 U JP 16329477U JP S5489350 U JPS5489350 U JP S5489350U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16329477U JPS5489350U (de) | 1977-12-07 | 1977-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16329477U JPS5489350U (de) | 1977-12-07 | 1977-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5489350U true JPS5489350U (de) | 1979-06-25 |
Family
ID=29159803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16329477U Pending JPS5489350U (de) | 1977-12-07 | 1977-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5489350U (de) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57131361A (en) * | 1981-02-09 | 1982-08-14 | Mitsubishi Heavy Ind Ltd | Zinc plating method by multi-stages vapor deposition |
| JPS59197145A (ja) * | 1979-12-21 | 1984-11-08 | バリアン・アソシエイツ・インコ−ポレイテツド | ウエ−ハ処理装置 |
| JPS59169354U (ja) * | 1983-04-29 | 1984-11-13 | 株式会社島津製作所 | 成膜装置 |
| JPH0677134A (ja) * | 1992-08-26 | 1994-03-18 | Nec Kansai Ltd | 真空加熱方法 |
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1977
- 1977-12-07 JP JP16329477U patent/JPS5489350U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59197145A (ja) * | 1979-12-21 | 1984-11-08 | バリアン・アソシエイツ・インコ−ポレイテツド | ウエ−ハ処理装置 |
| JPS6296673A (ja) * | 1979-12-21 | 1987-05-06 | バリアン・アソシエイツ・インコ−ポレイテツド | ウエ−ハ処理装置 |
| JPH03177572A (ja) * | 1979-12-21 | 1991-08-01 | Varian Assoc Inc | ウェーハを熱処理する装置 |
| JPS57131361A (en) * | 1981-02-09 | 1982-08-14 | Mitsubishi Heavy Ind Ltd | Zinc plating method by multi-stages vapor deposition |
| JPS59169354U (ja) * | 1983-04-29 | 1984-11-13 | 株式会社島津製作所 | 成膜装置 |
| JPH0677134A (ja) * | 1992-08-26 | 1994-03-18 | Nec Kansai Ltd | 真空加熱方法 |