JPS5480799A - Sensor element having unitary construction of thick resistor and sensor unit - Google Patents

Sensor element having unitary construction of thick resistor and sensor unit

Info

Publication number
JPS5480799A
JPS5480799A JP14812677A JP14812677A JPS5480799A JP S5480799 A JPS5480799 A JP S5480799A JP 14812677 A JP14812677 A JP 14812677A JP 14812677 A JP14812677 A JP 14812677A JP S5480799 A JPS5480799 A JP S5480799A
Authority
JP
Japan
Prior art keywords
terminals
sensor
sensor element
paste
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14812677A
Other languages
Japanese (ja)
Inventor
Shoichi Iwanaga
Nobuyuki Sugishita
Katsuo Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14812677A priority Critical patent/JPS5480799A/en
Publication of JPS5480799A publication Critical patent/JPS5480799A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To make a sensor element respond to moisture at a high responding rate and to gases in high sensitivity by holding a thich resistor at a preset spacing aount the three sides of a sensor unit.
CONSTITUTION: An alumina substrate 1 is printed with terminals 2 and 2' for resistors with an AU paste and is sintered. There is formed between the terminals 2 and 2' an exothermic resistor 3 having a generally C shape with the use of a resistive paste which is prepared by mixing RuO2 with crystal glass frit of lead borosilicate and further with a vehicle. The inside is printed with sensor terminals 5 and 5' with the use of the Au paste, and SnO2 is applied in a preset shape between the terminals 5 and 5'. After that, a heat treatment and an aging are accomplished at 150°C thereby to produce the desired sensor element.
COPYRIGHT: (C)1979,JPO&Japio
JP14812677A 1977-12-12 1977-12-12 Sensor element having unitary construction of thick resistor and sensor unit Pending JPS5480799A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14812677A JPS5480799A (en) 1977-12-12 1977-12-12 Sensor element having unitary construction of thick resistor and sensor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14812677A JPS5480799A (en) 1977-12-12 1977-12-12 Sensor element having unitary construction of thick resistor and sensor unit

Publications (1)

Publication Number Publication Date
JPS5480799A true JPS5480799A (en) 1979-06-27

Family

ID=15445831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14812677A Pending JPS5480799A (en) 1977-12-12 1977-12-12 Sensor element having unitary construction of thick resistor and sensor unit

Country Status (1)

Country Link
JP (1) JPS5480799A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5772156U (en) * 1980-10-20 1982-05-01
JP2002039983A (en) * 2000-07-21 2002-02-06 Denso Corp Humidity sensor
JP2002286673A (en) * 2001-03-28 2002-10-03 Denso Corp Gas sensor and its manufacturing method
US7199446B1 (en) * 2003-02-18 2007-04-03 K2 Optronics, Inc. Stacked electrical resistor pad for optical fiber attachment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5772156U (en) * 1980-10-20 1982-05-01
JPS6139325Y2 (en) * 1980-10-20 1986-11-11
JP2002039983A (en) * 2000-07-21 2002-02-06 Denso Corp Humidity sensor
JP2002286673A (en) * 2001-03-28 2002-10-03 Denso Corp Gas sensor and its manufacturing method
US7199446B1 (en) * 2003-02-18 2007-04-03 K2 Optronics, Inc. Stacked electrical resistor pad for optical fiber attachment

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