JPS547930A - Development of resist - Google Patents

Development of resist

Info

Publication number
JPS547930A
JPS547930A JP7288777A JP7288777A JPS547930A JP S547930 A JPS547930 A JP S547930A JP 7288777 A JP7288777 A JP 7288777A JP 7288777 A JP7288777 A JP 7288777A JP S547930 A JPS547930 A JP S547930A
Authority
JP
Japan
Prior art keywords
resist
development
dioxane
irradiating
inter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7288777A
Other languages
Japanese (ja)
Inventor
Tateo Kitamura
Yasuhiro Yoneda
Toshisuke Kitakoji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7288777A priority Critical patent/JPS547930A/en
Publication of JPS547930A publication Critical patent/JPS547930A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G03F7/325—Non-aqueous compositions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

PURPOSE:To prevent a net-shaped resist from being left even if the inter-line space is narrow by irradiating the resist composed of high molecules having an epoxy radical at its side chain with an electron beam or X ray and then by effecting development while using dioxane as a developing liquid.
JP7288777A 1977-06-21 1977-06-21 Development of resist Pending JPS547930A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7288777A JPS547930A (en) 1977-06-21 1977-06-21 Development of resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7288777A JPS547930A (en) 1977-06-21 1977-06-21 Development of resist

Publications (1)

Publication Number Publication Date
JPS547930A true JPS547930A (en) 1979-01-20

Family

ID=13502290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7288777A Pending JPS547930A (en) 1977-06-21 1977-06-21 Development of resist

Country Status (1)

Country Link
JP (1) JPS547930A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5984519A (en) * 1982-11-08 1984-05-16 Hitachi Ltd Developer
US10427828B2 (en) 2015-06-03 2019-10-01 Rengo Co., Ltd. Corrugated paperboard box, perforation forming method for perforating corrugated paperboard sheet, and perforation forming device and perforation forming unit for perforating corrugated paperboard sheet
US11338535B2 (en) 2016-11-08 2022-05-24 Mitsubishi Heavy Industries Machinery Systems, Ltd. Sheet folding device and method, and box-making machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5984519A (en) * 1982-11-08 1984-05-16 Hitachi Ltd Developer
US10427828B2 (en) 2015-06-03 2019-10-01 Rengo Co., Ltd. Corrugated paperboard box, perforation forming method for perforating corrugated paperboard sheet, and perforation forming device and perforation forming unit for perforating corrugated paperboard sheet
US11338535B2 (en) 2016-11-08 2022-05-24 Mitsubishi Heavy Industries Machinery Systems, Ltd. Sheet folding device and method, and box-making machine

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