JPS5467462A - Gas flow meter - Google Patents

Gas flow meter

Info

Publication number
JPS5467462A
JPS5467462A JP13491577A JP13491577A JPS5467462A JP S5467462 A JPS5467462 A JP S5467462A JP 13491577 A JP13491577 A JP 13491577A JP 13491577 A JP13491577 A JP 13491577A JP S5467462 A JPS5467462 A JP S5467462A
Authority
JP
Japan
Prior art keywords
flow meter
meter
mesh elements
flow
laminar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13491577A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5734494B2 (enExample
Inventor
Takeshi Yasukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13491577A priority Critical patent/JPS5467462A/ja
Publication of JPS5467462A publication Critical patent/JPS5467462A/ja
Publication of JPS5734494B2 publication Critical patent/JPS5734494B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP13491577A 1977-11-09 1977-11-09 Gas flow meter Granted JPS5467462A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13491577A JPS5467462A (en) 1977-11-09 1977-11-09 Gas flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13491577A JPS5467462A (en) 1977-11-09 1977-11-09 Gas flow meter

Publications (2)

Publication Number Publication Date
JPS5467462A true JPS5467462A (en) 1979-05-30
JPS5734494B2 JPS5734494B2 (enExample) 1982-07-23

Family

ID=15139499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13491577A Granted JPS5467462A (en) 1977-11-09 1977-11-09 Gas flow meter

Country Status (1)

Country Link
JP (1) JPS5467462A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7150994B2 (en) * 1999-03-03 2006-12-19 Symyx Technologies, Inc. Parallel flow process optimization reactor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61145689U (enExample) * 1985-02-28 1986-09-08
JP6960278B2 (ja) * 2017-08-31 2021-11-05 東京エレクトロン株式会社 流量測定システムを検査する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7150994B2 (en) * 1999-03-03 2006-12-19 Symyx Technologies, Inc. Parallel flow process optimization reactor

Also Published As

Publication number Publication date
JPS5734494B2 (enExample) 1982-07-23

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