JPS546570A - Production of optical guides - Google Patents
Production of optical guidesInfo
- Publication number
- JPS546570A JPS546570A JP7170677A JP7170677A JPS546570A JP S546570 A JPS546570 A JP S546570A JP 7170677 A JP7170677 A JP 7170677A JP 7170677 A JP7170677 A JP 7170677A JP S546570 A JPS546570 A JP S546570A
- Authority
- JP
- Japan
- Prior art keywords
- production
- optical guides
- masks
- guides
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7170677A JPS6032844B2 (ja) | 1977-06-16 | 1977-06-16 | 光導波路の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7170677A JPS6032844B2 (ja) | 1977-06-16 | 1977-06-16 | 光導波路の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS546570A true JPS546570A (en) | 1979-01-18 |
JPS6032844B2 JPS6032844B2 (ja) | 1985-07-30 |
Family
ID=13468242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7170677A Expired JPS6032844B2 (ja) | 1977-06-16 | 1977-06-16 | 光導波路の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6032844B2 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56105637A (en) * | 1980-01-28 | 1981-08-22 | Nec Corp | Formation of pattern |
JPS56105636A (en) * | 1980-01-28 | 1981-08-22 | Nec Corp | Formation of pattern |
JPS60107836A (ja) * | 1983-10-22 | 1985-06-13 | インターナシヨナル スタンダード エレクトリツク コーポレイシヨン | パターン形成方法 |
JPS6175525A (ja) * | 1984-09-12 | 1986-04-17 | Mitsubishi Electric Corp | 微細加工方法 |
JP2014157853A (ja) * | 2013-02-14 | 2014-08-28 | Toppan Printing Co Ltd | パターン形成体の製造方法およびパターン形成体 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1213782A (zh) * | 1997-10-02 | 1999-04-14 | 三星电子株式会社 | 一种光波导装置的制造方法 |
-
1977
- 1977-06-16 JP JP7170677A patent/JPS6032844B2/ja not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56105637A (en) * | 1980-01-28 | 1981-08-22 | Nec Corp | Formation of pattern |
JPS56105636A (en) * | 1980-01-28 | 1981-08-22 | Nec Corp | Formation of pattern |
JPS60107836A (ja) * | 1983-10-22 | 1985-06-13 | インターナシヨナル スタンダード エレクトリツク コーポレイシヨン | パターン形成方法 |
JPS6175525A (ja) * | 1984-09-12 | 1986-04-17 | Mitsubishi Electric Corp | 微細加工方法 |
JPH0546096B2 (ja) * | 1984-09-12 | 1993-07-13 | Mitsubishi Electric Corp | |
JP2014157853A (ja) * | 2013-02-14 | 2014-08-28 | Toppan Printing Co Ltd | パターン形成体の製造方法およびパターン形成体 |
Also Published As
Publication number | Publication date |
---|---|
JPS6032844B2 (ja) | 1985-07-30 |
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