JPS5453877A - Temperature compensation circuit of semiconductor strain gauge - Google Patents

Temperature compensation circuit of semiconductor strain gauge

Info

Publication number
JPS5453877A
JPS5453877A JP11991677A JP11991677A JPS5453877A JP S5453877 A JPS5453877 A JP S5453877A JP 11991677 A JP11991677 A JP 11991677A JP 11991677 A JP11991677 A JP 11991677A JP S5453877 A JPS5453877 A JP S5453877A
Authority
JP
Japan
Prior art keywords
strain gauge
compensation circuit
temperature
temperature compensation
semiconductor strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11991677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142876B2 (en, 2012
Inventor
Kazuji Yamada
Hideo Sato
Motohisa Nishihara
Yasumasa Matsuda
Satoshi Shimada
Tsutomu Okayama
Yoshitaka Matsuoka
Katsuya Katogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11991677A priority Critical patent/JPS5453877A/ja
Priority to US05/948,778 priority patent/US4173148A/en
Publication of JPS5453877A publication Critical patent/JPS5453877A/ja
Publication of JPS6142876B2 publication Critical patent/JPS6142876B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP11991677A 1977-10-07 1977-10-07 Temperature compensation circuit of semiconductor strain gauge Granted JPS5453877A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11991677A JPS5453877A (en) 1977-10-07 1977-10-07 Temperature compensation circuit of semiconductor strain gauge
US05/948,778 US4173148A (en) 1977-10-07 1978-10-05 Semiconductor strain gauge with temperature compensator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11991677A JPS5453877A (en) 1977-10-07 1977-10-07 Temperature compensation circuit of semiconductor strain gauge

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP15873281A Division JPS57103027A (en) 1981-10-07 1981-10-07 Semiconductor transducer

Publications (2)

Publication Number Publication Date
JPS5453877A true JPS5453877A (en) 1979-04-27
JPS6142876B2 JPS6142876B2 (en, 2012) 1986-09-24

Family

ID=14773354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11991677A Granted JPS5453877A (en) 1977-10-07 1977-10-07 Temperature compensation circuit of semiconductor strain gauge

Country Status (2)

Country Link
US (1) US4173148A (en, 2012)
JP (1) JPS5453877A (en, 2012)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57103027A (en) * 1981-10-07 1982-06-26 Hitachi Ltd Semiconductor transducer
JPS58123780A (ja) * 1982-01-20 1983-07-23 Hitachi Ltd 半導体ストレインゲ−ジトランスジユ−サ
JPS59184819A (ja) * 1983-04-06 1984-10-20 Hitachi Ltd 半導体圧力センサ
JP2002527767A (ja) * 1998-10-21 2002-08-27 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング ブリッジ回路内に接続されている圧抵抗性測定抵抗の特性曲線の温度非線形性補償のための回路装置
CN106227285A (zh) * 2015-06-02 2016-12-14 精工半导体有限公司 温度补偿电路及传感器装置

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4299130A (en) * 1979-10-22 1981-11-10 Gould Inc. Thin film strain gage apparatus with unstrained temperature compensation resistances
USRE32631E (en) * 1984-03-12 1988-03-29 Frazier Precision Instrument Company, Inc. Measurement circuit for load cell
JPH0797010B2 (ja) * 1986-03-26 1995-10-18 株式会社日立製作所 半導体歪ゲ−ジブリツジ回路
US4807151A (en) * 1986-04-11 1989-02-21 Purdue Research Foundation Electrical technique for correcting bridge type mass air flow rate sensor errors resulting from ambient temperature variations
JPH0691265B2 (ja) * 1986-08-01 1994-11-14 株式会社日立製作所 半導体圧力センサ
DE3772514D1 (de) * 1986-10-28 1991-10-02 Sumitomo Electric Industries Messverfahren fuer einen halbleiter-druckmessfuehler.
US4809536A (en) * 1986-11-06 1989-03-07 Sumitomo Electric Industries, Ltd. Method of adjusting bridge circuit of semiconductor pressure sensor
US5431064A (en) * 1992-09-18 1995-07-11 Home Row, Inc. Transducer array
CA2203658A1 (en) * 1994-10-27 1996-05-09 Randy John Brunn Mixing apparatus
DE19825761C2 (de) * 1998-06-09 2001-02-08 Fraunhofer Ges Forschung Vorrichtung zum Erfassen einer Dehnung und/oder einer Stauchung eines Körpers
GB2370122B (en) * 2000-12-16 2005-04-27 Senstronics Ltd Temperature compensated strain gauge
US20090255736A1 (en) * 2006-09-05 2009-10-15 Kazufumi Naito Load cell unit, weight checker, electronic balance, and balance
RU2507476C1 (ru) * 2012-07-03 2014-02-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ настройки тензорезисторных датчиков с мостовой измерительной цепью по мультипликативной температурной погрешности с учетом положительной нелинейности температурной характеристики выходного сигнала датчика
RU2507477C1 (ru) * 2012-07-03 2014-02-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ настройки тензорезисторных датчиков с мостовой измерительной цепью по мультипликативной температурной погрешности с учетом положительной нелинейности температурной характеристики выходного сигнала датчика
RU2507475C1 (ru) * 2012-07-03 2014-02-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ настройки тензорезисторных датчиков с мостовой измерительной цепью по мультипликативной температурной погрешности с учетом положительной нелинейности температурной характеристики выходного сигнала датчика
RU2506534C1 (ru) * 2012-07-20 2014-02-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ настройки тензорезисторных датчиков с мостовой измерительной цепью по мультипликативной температурной погрешности с учетом положительной нелинейности температурной характеристики выходного сигнала датчика
RU2539816C1 (ru) * 2013-07-23 2015-01-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет Косвенный способ настройки тензорезисторных датчиков с мостовой измерительной цепью по мультипликативной температурной погрешности с учетом отрицательной нелинейности температурной характеристики выходного сигнала датчика
RU2542611C1 (ru) * 2013-07-23 2015-02-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Косвенный способ настройки тензорезисторных датчиков с мостовой измерительной цепью по мультипликативной температурной погрешности с учетом отрицательной нелинейности температурной характеристики выходного сигнала датчика
DE102015222756A1 (de) 2015-11-18 2017-05-18 Robert Bosch Gmbh Sensorelement für einen Drucksensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2801388A (en) * 1953-09-15 1957-07-30 Baldwin Lima Hamilton Corp Extensometer with adjustable temperature compensation
US3161821A (en) * 1962-07-02 1964-12-15 Statham Instrument Inc Wheatstone bridge transducer circuits with external balancing means

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57103027A (en) * 1981-10-07 1982-06-26 Hitachi Ltd Semiconductor transducer
JPS58123780A (ja) * 1982-01-20 1983-07-23 Hitachi Ltd 半導体ストレインゲ−ジトランスジユ−サ
JPS59184819A (ja) * 1983-04-06 1984-10-20 Hitachi Ltd 半導体圧力センサ
JP2002527767A (ja) * 1998-10-21 2002-08-27 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング ブリッジ回路内に接続されている圧抵抗性測定抵抗の特性曲線の温度非線形性補償のための回路装置
CN106227285A (zh) * 2015-06-02 2016-12-14 精工半导体有限公司 温度补偿电路及传感器装置

Also Published As

Publication number Publication date
US4173148A (en) 1979-11-06
JPS6142876B2 (en, 2012) 1986-09-24

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