JPS5443022A - Mask for fine figure projection - Google Patents

Mask for fine figure projection

Info

Publication number
JPS5443022A
JPS5443022A JP10880977A JP10880977A JPS5443022A JP S5443022 A JPS5443022 A JP S5443022A JP 10880977 A JP10880977 A JP 10880977A JP 10880977 A JP10880977 A JP 10880977A JP S5443022 A JPS5443022 A JP S5443022A
Authority
JP
Japan
Prior art keywords
mask
projection
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10880977A
Other languages
Japanese (ja)
Inventor
Chikaichi Itou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP10880977A priority Critical patent/JPS5443022A/en
Publication of JPS5443022A publication Critical patent/JPS5443022A/en
Pending legal-status Critical Current

Links

JP10880977A 1977-09-12 1977-09-12 Mask for fine figure projection Pending JPS5443022A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10880977A JPS5443022A (en) 1977-09-12 1977-09-12 Mask for fine figure projection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10880977A JPS5443022A (en) 1977-09-12 1977-09-12 Mask for fine figure projection

Publications (1)

Publication Number Publication Date
JPS5443022A true JPS5443022A (en) 1979-04-05

Family

ID=14494030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10880977A Pending JPS5443022A (en) 1977-09-12 1977-09-12 Mask for fine figure projection

Country Status (1)

Country Link
JP (1) JPS5443022A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61250635A (en) * 1985-04-26 1986-11-07 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Resist structural body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61250635A (en) * 1985-04-26 1986-11-07 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Resist structural body

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