JPS5463828A - Developer for photoresist - Google Patents

Developer for photoresist

Info

Publication number
JPS5463828A
JPS5463828A JP13044377A JP13044377A JPS5463828A JP S5463828 A JPS5463828 A JP S5463828A JP 13044377 A JP13044377 A JP 13044377A JP 13044377 A JP13044377 A JP 13044377A JP S5463828 A JPS5463828 A JP S5463828A
Authority
JP
Japan
Prior art keywords
photoresist
developer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13044377A
Other languages
Japanese (ja)
Inventor
Tokou Harada
Yoshiyuki Harita
Hideyuki Hanaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP13044377A priority Critical patent/JPS5463828A/en
Publication of JPS5463828A publication Critical patent/JPS5463828A/en
Pending legal-status Critical Current

Links

JP13044377A 1977-10-31 1977-10-31 Developer for photoresist Pending JPS5463828A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13044377A JPS5463828A (en) 1977-10-31 1977-10-31 Developer for photoresist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13044377A JPS5463828A (en) 1977-10-31 1977-10-31 Developer for photoresist

Publications (1)

Publication Number Publication Date
JPS5463828A true JPS5463828A (en) 1979-05-23

Family

ID=15034357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13044377A Pending JPS5463828A (en) 1977-10-31 1977-10-31 Developer for photoresist

Country Status (1)

Country Link
JP (1) JPS5463828A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134847A (en) * 1979-04-06 1980-10-21 Nec Corp Manufacture of resist image
JPS5627143A (en) * 1979-08-14 1981-03-16 Japan Synthetic Rubber Co Ltd Polymer type photoresist developing method
JPS5683740A (en) * 1979-12-13 1981-07-08 Japan Synthetic Rubber Co Ltd Developer for polymer photoresist

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134847A (en) * 1979-04-06 1980-10-21 Nec Corp Manufacture of resist image
JPS5627143A (en) * 1979-08-14 1981-03-16 Japan Synthetic Rubber Co Ltd Polymer type photoresist developing method
JPH0145054B2 (en) * 1979-08-14 1989-10-02 Japan Synthetic Rubber Co Ltd
JPS5683740A (en) * 1979-12-13 1981-07-08 Japan Synthetic Rubber Co Ltd Developer for polymer photoresist

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