JPS5359501A - Mask for copying pattern - Google Patents
Mask for copying patternInfo
- Publication number
- JPS5359501A JPS5359501A JP13266476A JP13266476A JPS5359501A JP S5359501 A JPS5359501 A JP S5359501A JP 13266476 A JP13266476 A JP 13266476A JP 13266476 A JP13266476 A JP 13266476A JP S5359501 A JPS5359501 A JP S5359501A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- copying pattern
- copying
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51132664A JPS6037461B2 (en) | 1976-11-04 | 1976-11-04 | Pattern transfer mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51132664A JPS6037461B2 (en) | 1976-11-04 | 1976-11-04 | Pattern transfer mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5359501A true JPS5359501A (en) | 1978-05-29 |
JPS6037461B2 JPS6037461B2 (en) | 1985-08-26 |
Family
ID=15086600
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51132664A Expired JPS6037461B2 (en) | 1976-11-04 | 1976-11-04 | Pattern transfer mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6037461B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0335654Y2 (en) * | 1984-09-10 | 1991-07-29 | ||
JPS6430785U (en) * | 1987-08-19 | 1989-02-27 |
-
1976
- 1976-11-04 JP JP51132664A patent/JPS6037461B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6037461B2 (en) | 1985-08-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5480082A (en) | Mask for projecting print | |
GB1539305A (en) | Mask making | |
JPS5315274A (en) | Mask for vaporrphase deposition | |
GB1556679A (en) | Face mask | |
JPS5344441A (en) | Material for resist | |
JPS5294143A (en) | Copying apparatus | |
JPS5288346A (en) | Copying apparatus | |
JPS5369028A (en) | Copying machine exposure system | |
JPS52100242A (en) | Copying apparatus | |
JPS5296031A (en) | Copying apparatus | |
GB2088084B (en) | Pattern exposure mask | |
JPS52127333A (en) | Photosensitive copying machine | |
JPS52121319A (en) | Exposure controller | |
GB1544787A (en) | Masks for x-ray lithography | |
JPS5331886A (en) | Resist printing method | |
JPS5359501A (en) | Mask for copying pattern | |
JPS52133221A (en) | Copying apparatus | |
HK21078A (en) | Masaging mask | |
JPS5396677A (en) | Reflective mask for forming pattern | |
GB1544876A (en) | Copying apparatus | |
JPS52126303A (en) | Printing metal mask | |
JPS5441132A (en) | Mask for xxray exposure | |
JPS5463828A (en) | Developer for photoresist | |
JPS52126304A (en) | Printing metal mask | |
JPS5355203A (en) | Mask for exposure |