JPS5359501A - Mask for copying pattern - Google Patents

Mask for copying pattern

Info

Publication number
JPS5359501A
JPS5359501A JP13266476A JP13266476A JPS5359501A JP S5359501 A JPS5359501 A JP S5359501A JP 13266476 A JP13266476 A JP 13266476A JP 13266476 A JP13266476 A JP 13266476A JP S5359501 A JPS5359501 A JP S5359501A
Authority
JP
Japan
Prior art keywords
mask
copying pattern
copying
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13266476A
Other languages
Japanese (ja)
Other versions
JPS6037461B2 (en
Inventor
Hatsuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP51132664A priority Critical patent/JPS6037461B2/en
Publication of JPS5359501A publication Critical patent/JPS5359501A/en
Publication of JPS6037461B2 publication Critical patent/JPS6037461B2/en
Expired legal-status Critical Current

Links

JP51132664A 1976-11-04 1976-11-04 Pattern transfer mask Expired JPS6037461B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51132664A JPS6037461B2 (en) 1976-11-04 1976-11-04 Pattern transfer mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51132664A JPS6037461B2 (en) 1976-11-04 1976-11-04 Pattern transfer mask

Publications (2)

Publication Number Publication Date
JPS5359501A true JPS5359501A (en) 1978-05-29
JPS6037461B2 JPS6037461B2 (en) 1985-08-26

Family

ID=15086600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51132664A Expired JPS6037461B2 (en) 1976-11-04 1976-11-04 Pattern transfer mask

Country Status (1)

Country Link
JP (1) JPS6037461B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0335654Y2 (en) * 1984-09-10 1991-07-29
JPS6430785U (en) * 1987-08-19 1989-02-27

Also Published As

Publication number Publication date
JPS6037461B2 (en) 1985-08-26

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