JPS5442195A - Sample analyzing apparatus by charged particle beams - Google Patents

Sample analyzing apparatus by charged particle beams

Info

Publication number
JPS5442195A
JPS5442195A JP10904577A JP10904577A JPS5442195A JP S5442195 A JPS5442195 A JP S5442195A JP 10904577 A JP10904577 A JP 10904577A JP 10904577 A JP10904577 A JP 10904577A JP S5442195 A JPS5442195 A JP S5442195A
Authority
JP
Japan
Prior art keywords
analyzing apparatus
charged particle
particle beams
sample analyzing
shells
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10904577A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153825B2 (enrdf_load_stackoverflow
Inventor
Masabumi Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10904577A priority Critical patent/JPS5442195A/ja
Publication of JPS5442195A publication Critical patent/JPS5442195A/ja
Publication of JPS6153825B2 publication Critical patent/JPS6153825B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP10904577A 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams Granted JPS5442195A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10904577A JPS5442195A (en) 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10904577A JPS5442195A (en) 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams

Publications (2)

Publication Number Publication Date
JPS5442195A true JPS5442195A (en) 1979-04-03
JPS6153825B2 JPS6153825B2 (enrdf_load_stackoverflow) 1986-11-19

Family

ID=14500199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10904577A Granted JPS5442195A (en) 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams

Country Status (1)

Country Link
JP (1) JPS5442195A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789780A (en) * 1986-03-18 1988-12-06 U.S. Philips Corporation Apparatus for energy-selective visualization

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789780A (en) * 1986-03-18 1988-12-06 U.S. Philips Corporation Apparatus for energy-selective visualization

Also Published As

Publication number Publication date
JPS6153825B2 (enrdf_load_stackoverflow) 1986-11-19

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