JPS5364093A - Auger analyzer - Google Patents
Auger analyzerInfo
- Publication number
- JPS5364093A JPS5364093A JP13843276A JP13843276A JPS5364093A JP S5364093 A JPS5364093 A JP S5364093A JP 13843276 A JP13843276 A JP 13843276A JP 13843276 A JP13843276 A JP 13843276A JP S5364093 A JPS5364093 A JP S5364093A
- Authority
- JP
- Japan
- Prior art keywords
- auger analyzer
- analyzer
- energy analyzer
- auger
- halves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE:To reduce the length and size of an inner cylinder of an energy analyzer by dividing an electron beam converging system into two halves to arrange one half inside of the energy analyzer while the other outside of the same.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13843276A JPS5364093A (en) | 1976-11-19 | 1976-11-19 | Auger analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13843276A JPS5364093A (en) | 1976-11-19 | 1976-11-19 | Auger analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5364093A true JPS5364093A (en) | 1978-06-08 |
Family
ID=15221826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13843276A Pending JPS5364093A (en) | 1976-11-19 | 1976-11-19 | Auger analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5364093A (en) |
-
1976
- 1976-11-19 JP JP13843276A patent/JPS5364093A/en active Pending
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