JPS5364093A - Auger analyzer - Google Patents

Auger analyzer

Info

Publication number
JPS5364093A
JPS5364093A JP13843276A JP13843276A JPS5364093A JP S5364093 A JPS5364093 A JP S5364093A JP 13843276 A JP13843276 A JP 13843276A JP 13843276 A JP13843276 A JP 13843276A JP S5364093 A JPS5364093 A JP S5364093A
Authority
JP
Japan
Prior art keywords
auger analyzer
analyzer
energy analyzer
auger
halves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13843276A
Other languages
Japanese (ja)
Inventor
Atsushi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13843276A priority Critical patent/JPS5364093A/en
Publication of JPS5364093A publication Critical patent/JPS5364093A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To reduce the length and size of an inner cylinder of an energy analyzer by dividing an electron beam converging system into two halves to arrange one half inside of the energy analyzer while the other outside of the same.
JP13843276A 1976-11-19 1976-11-19 Auger analyzer Pending JPS5364093A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13843276A JPS5364093A (en) 1976-11-19 1976-11-19 Auger analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13843276A JPS5364093A (en) 1976-11-19 1976-11-19 Auger analyzer

Publications (1)

Publication Number Publication Date
JPS5364093A true JPS5364093A (en) 1978-06-08

Family

ID=15221826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13843276A Pending JPS5364093A (en) 1976-11-19 1976-11-19 Auger analyzer

Country Status (1)

Country Link
JP (1) JPS5364093A (en)

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