JPS5441341B2 - - Google Patents
Info
- Publication number
- JPS5441341B2 JPS5441341B2 JP11076373A JP11076373A JPS5441341B2 JP S5441341 B2 JPS5441341 B2 JP S5441341B2 JP 11076373 A JP11076373 A JP 11076373A JP 11076373 A JP11076373 A JP 11076373A JP S5441341 B2 JPS5441341 B2 JP S5441341B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/16—Investigating or analyzing materials by the use of thermal means by investigating thermal coefficient of expansion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29411472A | 1972-10-02 | 1972-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4970649A JPS4970649A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-07-09 |
| JPS5441341B2 true JPS5441341B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-12-07 |
Family
ID=23131943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11076373A Expired JPS5441341B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-10-02 | 1973-10-02 |
Country Status (7)
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2198636A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-09-06 | 1974-03-29 | France Etat | |
| US4043671A (en) * | 1976-07-13 | 1977-08-23 | The United States Of America As Represented By The United States Energy Research And Development Administration | Laser system preset unit |
| US4147435A (en) * | 1977-06-30 | 1979-04-03 | International Business Machines Corporation | Interferometric process and apparatus for the measurement of the etch rate of opaque surfaces |
| US4329059A (en) * | 1980-03-03 | 1982-05-11 | The Boeing Company | Multiple channel interferometer |
| US4334778A (en) * | 1980-09-12 | 1982-06-15 | The United States Of America As Represented By The United States Department Of Energy | Dual surface interferometer |
| EP0084144B1 (de) * | 1982-01-15 | 1988-09-21 | Firma Carl Zeiss | Dreidimensionale interferometrische Längenmesseinrichtung |
| JPS58158508A (ja) * | 1982-03-16 | 1983-09-20 | Mitsubishi Heavy Ind Ltd | 高温ひずみ計測方法 |
| US5350899A (en) * | 1992-04-15 | 1994-09-27 | Hiroichi Ishikawa | Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber |
| US4711574A (en) * | 1984-04-27 | 1987-12-08 | Hewlett-Packard Company | Minimum deadpath interferometer and dilatometer |
| US4930894A (en) * | 1984-04-27 | 1990-06-05 | Hewlett-Packard Company | Minimum deadpath interferometer and dilatometer |
| JPS60231146A (ja) * | 1984-05-01 | 1985-11-16 | Rigaku Denki Kk | 熱膨張率測定装置 |
| JPS60237307A (ja) * | 1984-05-11 | 1985-11-26 | Yokogawa Hewlett Packard Ltd | レ−ザ測長器 |
| JP2519411B2 (ja) * | 1985-11-26 | 1996-07-31 | 真空理工 株式会社 | 熱膨張計 |
| US4746216A (en) * | 1986-03-28 | 1988-05-24 | Zygo Corporation | Angle measuring interferometer |
| US4717250A (en) * | 1986-03-28 | 1988-01-05 | Zygo Corporation | Angle measuring interferometer |
| US4802764A (en) * | 1986-03-28 | 1989-02-07 | Young Peter S | Differential plane mirror interferometer having beamsplitter/beam folder assembly |
| US4815856A (en) * | 1986-06-05 | 1989-03-28 | Storage Technology Partners Ii | Method and apparatus for measuring the absolute thickness of dust defocus layers |
| JPS62298702A (ja) * | 1986-06-12 | 1987-12-25 | ジゴ− コ−ポレ−シヨン | 差動平面鏡干渉計システム |
| JPS63124901A (ja) * | 1986-11-07 | 1988-05-28 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 干渉計 |
| JPH0721472B2 (ja) * | 1986-12-11 | 1995-03-08 | 品川白煉瓦株式会社 | セラミックスの熱間における変位測定装置 |
| US4784490A (en) * | 1987-03-02 | 1988-11-15 | Hewlett-Packard Company | High thermal stability plane mirror interferometer |
| US5121987A (en) * | 1989-03-02 | 1992-06-16 | Honeywell Inc. | Method and apparatus for measuring coefficient of thermal expansion |
| US4989980A (en) * | 1989-03-02 | 1991-02-05 | Honeywell Inc. | Method and apparatus for measuring coefficient of thermal expansion |
| US5018862A (en) * | 1989-11-02 | 1991-05-28 | Aerotech, Inc. | Successive fringe detection position interferometry |
| DD296549A5 (de) * | 1990-07-13 | 1991-12-05 | ����@�����@����@����@����@����K@����K`�����K@�������������@���k�� | Stehwelleninterpolator |
| US5404222A (en) * | 1994-01-14 | 1995-04-04 | Sparta, Inc. | Interferametric measuring system with air turbulence compensation |
| US5991033A (en) * | 1996-09-20 | 1999-11-23 | Sparta, Inc. | Interferometer with air turbulence compensation |
| ITMO20010248A1 (it) * | 2001-12-12 | 2003-06-12 | Expert System Solutions Srl | Dilatometro ottico perfezionato |
| US7025498B2 (en) * | 2003-05-30 | 2006-04-11 | Asml Holding N.V. | System and method of measuring thermal expansion |
| DE102004045802B4 (de) * | 2004-09-22 | 2009-02-05 | Robert Bosch Gmbh | Interferometrisches System mit Referenzfläche mit einer verspiegelten Zone |
| CN101881891B (zh) * | 2009-05-05 | 2012-10-03 | 菲尼萨光电通讯(上海)有限公司 | 偏振光分束仪 |
| GB2516281A (en) * | 2013-07-17 | 2015-01-21 | Cambridge Consultants | Optical apparatus and methods |
| CN104006739B (zh) * | 2014-05-29 | 2016-06-15 | 清华大学 | 一种光学八细分线性干涉仪 |
| CN108519402B (zh) * | 2018-03-28 | 2020-12-22 | 北京工业大学 | 激光法测量超薄玻璃再热线收缩率的装置和方法 |
| CN108759704B (zh) * | 2018-07-06 | 2020-05-26 | 武汉理工大学 | 一种光纤f-p复合腔型高温应变传感器 |
| CN118758994B (zh) * | 2024-07-31 | 2025-04-25 | 中国科学院精密测量科学与技术创新研究院 | 一种高精度的热膨胀系数测量装置 |
-
1972
- 1972-10-02 US US00294114A patent/US3788746A/en not_active Expired - Lifetime
-
1973
- 1973-09-24 GB GB4462973A patent/GB1450692A/en not_active Expired
- 1973-09-26 DE DE2348272A patent/DE2348272C3/de not_active Expired
- 1973-09-28 IT IT52813/73A patent/IT996218B/it active
- 1973-10-01 CH CH1404973A patent/CH569254A5/xx not_active IP Right Cessation
- 1973-10-02 JP JP11076373A patent/JPS5441341B2/ja not_active Expired
- 1973-10-02 FR FR7335169A patent/FR2201764A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2348272C3 (de) | 1975-09-11 |
| JPS4970649A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-07-09 |
| GB1450692A (en) | 1976-09-22 |
| FR2201764A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-04-26 |
| CH569254A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-11-14 |
| IT996218B (it) | 1975-12-10 |
| DE2348272B2 (de) | 1975-01-23 |
| US3788746A (en) | 1974-01-29 |
| DE2348272A1 (de) | 1974-04-18 |