JPS5440076A - P-type silicon substrate for epitaxial crowth - Google Patents
P-type silicon substrate for epitaxial crowthInfo
- Publication number
- JPS5440076A JPS5440076A JP10702477A JP10702477A JPS5440076A JP S5440076 A JPS5440076 A JP S5440076A JP 10702477 A JP10702477 A JP 10702477A JP 10702477 A JP10702477 A JP 10702477A JP S5440076 A JPS5440076 A JP S5440076A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial
- crowth
- silicon substrate
- type silicon
- ivgroup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To decrease the grid defect of the epitaxial layer by adding the II- or IVgroup element featuring a larger covalent crystal radius then Si to the B-doped Si.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10702477A JPS5440076A (en) | 1977-09-05 | 1977-09-05 | P-type silicon substrate for epitaxial crowth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10702477A JPS5440076A (en) | 1977-09-05 | 1977-09-05 | P-type silicon substrate for epitaxial crowth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5440076A true JPS5440076A (en) | 1979-03-28 |
Family
ID=14448572
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10702477A Pending JPS5440076A (en) | 1977-09-05 | 1977-09-05 | P-type silicon substrate for epitaxial crowth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5440076A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05226247A (en) * | 1991-10-08 | 1993-09-03 | Internatl Business Mach Corp <Ibm> | Epitaxial silicon film |
-
1977
- 1977-09-05 JP JP10702477A patent/JPS5440076A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05226247A (en) * | 1991-10-08 | 1993-09-03 | Internatl Business Mach Corp <Ibm> | Epitaxial silicon film |
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