JPS5440076A - P-type silicon substrate for epitaxial crowth - Google Patents

P-type silicon substrate for epitaxial crowth

Info

Publication number
JPS5440076A
JPS5440076A JP10702477A JP10702477A JPS5440076A JP S5440076 A JPS5440076 A JP S5440076A JP 10702477 A JP10702477 A JP 10702477A JP 10702477 A JP10702477 A JP 10702477A JP S5440076 A JPS5440076 A JP S5440076A
Authority
JP
Japan
Prior art keywords
epitaxial
crowth
silicon substrate
type silicon
ivgroup
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10702477A
Other languages
Japanese (ja)
Inventor
Masami Yokozawa
Hideaki Nagura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP10702477A priority Critical patent/JPS5440076A/en
Publication of JPS5440076A publication Critical patent/JPS5440076A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To decrease the grid defect of the epitaxial layer by adding the II- or IVgroup element featuring a larger covalent crystal radius then Si to the B-doped Si.
COPYRIGHT: (C)1979,JPO&Japio
JP10702477A 1977-09-05 1977-09-05 P-type silicon substrate for epitaxial crowth Pending JPS5440076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10702477A JPS5440076A (en) 1977-09-05 1977-09-05 P-type silicon substrate for epitaxial crowth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10702477A JPS5440076A (en) 1977-09-05 1977-09-05 P-type silicon substrate for epitaxial crowth

Publications (1)

Publication Number Publication Date
JPS5440076A true JPS5440076A (en) 1979-03-28

Family

ID=14448572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10702477A Pending JPS5440076A (en) 1977-09-05 1977-09-05 P-type silicon substrate for epitaxial crowth

Country Status (1)

Country Link
JP (1) JPS5440076A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226247A (en) * 1991-10-08 1993-09-03 Internatl Business Mach Corp <Ibm> Epitaxial silicon film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226247A (en) * 1991-10-08 1993-09-03 Internatl Business Mach Corp <Ibm> Epitaxial silicon film

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