JPS5435685A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5435685A
JPS5435685A JP10229677A JP10229677A JPS5435685A JP S5435685 A JPS5435685 A JP S5435685A JP 10229677 A JP10229677 A JP 10229677A JP 10229677 A JP10229677 A JP 10229677A JP S5435685 A JPS5435685 A JP S5435685A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
crystal
coating
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10229677A
Other languages
Japanese (ja)
Inventor
Shinobu Fukunaga
Masahiko Yasuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10229677A priority Critical patent/JPS5435685A/en
Publication of JPS5435685A publication Critical patent/JPS5435685A/en
Pending legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To reduce the thermal stress between a substrate and coating through a heat treatment and then diffusion while covering a single-crystal semiconductor coating containing impurities and single-crystal insulator substrate surface supporting it with a protective film.
JP10229677A 1977-08-25 1977-08-25 Manufacture of semiconductor device Pending JPS5435685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10229677A JPS5435685A (en) 1977-08-25 1977-08-25 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10229677A JPS5435685A (en) 1977-08-25 1977-08-25 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5435685A true JPS5435685A (en) 1979-03-15

Family

ID=14323643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10229677A Pending JPS5435685A (en) 1977-08-25 1977-08-25 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5435685A (en)

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Legal Events

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A131 Notification of reasons for refusal

Effective date: 20050531

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A313 Final decision of rejection without a dissenting response from the applicant

Effective date: 20051011

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A02 Decision of refusal

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Effective date: 20051122