JPS5434775A - Wafer handling device - Google Patents
Wafer handling deviceInfo
- Publication number
- JPS5434775A JPS5434775A JP10049277A JP10049277A JPS5434775A JP S5434775 A JPS5434775 A JP S5434775A JP 10049277 A JP10049277 A JP 10049277A JP 10049277 A JP10049277 A JP 10049277A JP S5434775 A JPS5434775 A JP S5434775A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- handling device
- wafer handling
- edge
- breakdown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To avoid the breakdown and contamination of a wafer by handling the wafer by the use of a plural number of arm units to which an edge sensor detecting the edge of the wafer and a vacuum tweezers absorbing the wafer are provided at a fixed interval.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10049277A JPS5434775A (en) | 1977-08-24 | 1977-08-24 | Wafer handling device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10049277A JPS5434775A (en) | 1977-08-24 | 1977-08-24 | Wafer handling device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5434775A true JPS5434775A (en) | 1979-03-14 |
JPS613637B2 JPS613637B2 (en) | 1986-02-03 |
Family
ID=14275418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10049277A Granted JPS5434775A (en) | 1977-08-24 | 1977-08-24 | Wafer handling device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5434775A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02247821A (en) * | 1989-02-24 | 1990-10-03 | Corning Inc | Disk for magnetic starage device |
JPH0640572A (en) * | 1982-05-24 | 1994-02-15 | Proconics Internatl Inc | Device for inserting wafer |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0323639Y2 (en) * | 1986-10-13 | 1991-05-23 | ||
JPH01112518U (en) * | 1988-01-25 | 1989-07-28 |
-
1977
- 1977-08-24 JP JP10049277A patent/JPS5434775A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0640572A (en) * | 1982-05-24 | 1994-02-15 | Proconics Internatl Inc | Device for inserting wafer |
JPH0648575A (en) * | 1982-05-24 | 1994-02-22 | Proconics Internatl Inc | Device for moving wafer |
JPH02247821A (en) * | 1989-02-24 | 1990-10-03 | Corning Inc | Disk for magnetic starage device |
Also Published As
Publication number | Publication date |
---|---|
JPS613637B2 (en) | 1986-02-03 |
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