JPS5433837B2 - - Google Patents

Info

Publication number
JPS5433837B2
JPS5433837B2 JP1228774A JP1228774A JPS5433837B2 JP S5433837 B2 JPS5433837 B2 JP S5433837B2 JP 1228774 A JP1228774 A JP 1228774A JP 1228774 A JP1228774 A JP 1228774A JP S5433837 B2 JPS5433837 B2 JP S5433837B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1228774A
Other languages
Japanese (ja)
Other versions
JPS49107680A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS49107680A publication Critical patent/JPS49107680A/ja
Publication of JPS5433837B2 publication Critical patent/JPS5433837B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/67Complementary BJTs
    • H10D84/673Vertical complementary BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/0112Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • H10D84/0119Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including complementary BJTs
    • H10D84/0121Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including complementary BJTs the complementary BJTs being vertical BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/05Etch and refill
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/051Etching
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/122Polycrystalline

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
JP1228774A 1973-02-02 1974-01-31 Expired JPS5433837B2 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7303748A FR2216678B1 (enExample) 1973-02-02 1973-02-02

Publications (2)

Publication Number Publication Date
JPS49107680A JPS49107680A (enExample) 1974-10-12
JPS5433837B2 true JPS5433837B2 (enExample) 1979-10-23

Family

ID=9114241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1228774A Expired JPS5433837B2 (enExample) 1973-02-02 1974-01-31

Country Status (10)

Country Link
US (1) US3959039A (enExample)
JP (1) JPS5433837B2 (enExample)
BR (1) BR7400752D0 (enExample)
CA (1) CA997870A (enExample)
DE (1) DE2403816C3 (enExample)
ES (1) ES422816A1 (enExample)
FR (1) FR2216678B1 (enExample)
GB (1) GB1450626A (enExample)
IT (1) IT1009603B (enExample)
NL (1) NL162249C (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2297495A1 (fr) * 1975-01-10 1976-08-06 Radiotechnique Compelec Structure de transistors complementaires et son procede de fabrication
FR2408914A1 (fr) * 1977-11-14 1979-06-08 Radiotechnique Compelec Dispositif semi-conducteur monolithique comprenant deux transistors complementaires et son procede de fabrication
JPS567473A (en) * 1979-06-29 1981-01-26 Mitsubishi Electric Corp Semiconductor switching device
JPS6081660U (ja) * 1983-11-10 1985-06-06 富士電機株式会社 ダ−リントントランジスタ
US4936928A (en) * 1985-11-27 1990-06-26 Raytheon Company Semiconductor device
GB2183907B (en) * 1985-11-27 1989-10-04 Raytheon Co Semiconductor device
EP2555235B1 (en) 2011-08-02 2014-06-18 Nxp B.V. Method of manufacturing an IC comprising a plurality of bipolar transistors and IC comprising a plurality of bipolar transistors

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3328652A (en) * 1964-07-20 1967-06-27 Gen Electric Voltage comparator
GB1075387A (en) * 1964-07-27 1967-07-12 Gen Electric Improvements in semicuoductor device making
FR1448776A (fr) * 1964-11-19 1966-03-18 Radiotechnique Perfectionnements aux agencements semi-conducteurs comportant plusieurs éléments à fonction définie solidaires d'un support unique
US3370995A (en) * 1965-08-02 1968-02-27 Texas Instruments Inc Method for fabricating electrically isolated semiconductor devices in integrated circuits
US3411052A (en) * 1965-10-28 1968-11-12 Ncr Co Logical circuit arrangement having a constant current gain for controlled operation i saturation
US3404450A (en) * 1966-01-26 1968-10-08 Westinghouse Electric Corp Method of fabricating an integrated circuit structure including unipolar transistor and bipolar transistor portions
US3460006A (en) * 1966-02-28 1969-08-05 Westinghouse Electric Corp Semiconductor integrated circuits with improved isolation
US3434022A (en) * 1967-01-27 1969-03-18 Motorola Inc Semiconductor controlled rectifier device
US3524113A (en) * 1967-06-15 1970-08-11 Ibm Complementary pnp-npn transistors and fabrication method therefor

Also Published As

Publication number Publication date
BR7400752D0 (pt) 1974-11-05
DE2403816C3 (de) 1979-10-25
NL162249B (nl) 1979-11-15
NL7401100A (enExample) 1974-08-06
DE2403816A1 (de) 1974-08-15
FR2216678B1 (enExample) 1977-08-19
NL162249C (nl) 1980-04-15
ES422816A1 (es) 1976-05-01
FR2216678A1 (enExample) 1974-08-30
GB1450626A (en) 1976-09-22
CA997870A (en) 1976-09-28
DE2403816B2 (de) 1979-02-22
JPS49107680A (enExample) 1974-10-12
IT1009603B (it) 1976-12-20
US3959039A (en) 1976-05-25

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