JPS543297A - Piezoelectric crystal film of zinc oxide - Google Patents

Piezoelectric crystal film of zinc oxide

Info

Publication number
JPS543297A
JPS543297A JP6845577A JP6845577A JPS543297A JP S543297 A JPS543297 A JP S543297A JP 6845577 A JP6845577 A JP 6845577A JP 6845577 A JP6845577 A JP 6845577A JP S543297 A JPS543297 A JP S543297A
Authority
JP
Japan
Prior art keywords
zinc oxide
crystal film
piezoelectric crystal
piezoelectric
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6845577A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5746228B2 (enExample
Inventor
Toshio Ogawa
Kouji Nishiyama
Tasuku Masuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP6845577A priority Critical patent/JPS543297A/ja
Priority to US05/913,803 priority patent/US4182793A/en
Priority to DE2825083A priority patent/DE2825083C2/de
Publication of JPS543297A publication Critical patent/JPS543297A/ja
Publication of JPS5746228B2 publication Critical patent/JPS5746228B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP6845577A 1977-06-09 1977-06-09 Piezoelectric crystal film of zinc oxide Granted JPS543297A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP6845577A JPS543297A (en) 1977-06-09 1977-06-09 Piezoelectric crystal film of zinc oxide
US05/913,803 US4182793A (en) 1977-06-09 1978-06-08 Piezoelectric crystalline film of zinc oxide
DE2825083A DE2825083C2 (de) 1977-06-09 1978-06-08 Piezoelektrischer kristalliner Film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6845577A JPS543297A (en) 1977-06-09 1977-06-09 Piezoelectric crystal film of zinc oxide

Publications (2)

Publication Number Publication Date
JPS543297A true JPS543297A (en) 1979-01-11
JPS5746228B2 JPS5746228B2 (enExample) 1982-10-01

Family

ID=13374179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6845577A Granted JPS543297A (en) 1977-06-09 1977-06-09 Piezoelectric crystal film of zinc oxide

Country Status (1)

Country Link
JP (1) JPS543297A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5432909U (enExample) * 1977-08-09 1979-03-03
JPS6042817U (ja) * 1983-09-02 1985-03-26 オリエンタル・アスベスト株式会社 柔軟性不燃屋根材
JPS6283462A (ja) * 1985-10-09 1987-04-16 Matsushita Electric Ind Co Ltd 配向性金属薄膜の製造方法
JPH068553U (ja) * 1992-04-20 1994-02-04 宮脇グレイズ工業株式会社 防水瓦

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5432909U (enExample) * 1977-08-09 1979-03-03
JPS6042817U (ja) * 1983-09-02 1985-03-26 オリエンタル・アスベスト株式会社 柔軟性不燃屋根材
JPS6283462A (ja) * 1985-10-09 1987-04-16 Matsushita Electric Ind Co Ltd 配向性金属薄膜の製造方法
JPH068553U (ja) * 1992-04-20 1994-02-04 宮脇グレイズ工業株式会社 防水瓦

Also Published As

Publication number Publication date
JPS5746228B2 (enExample) 1982-10-01

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