JPS5428072B2 - - Google Patents
Info
- Publication number
- JPS5428072B2 JPS5428072B2 JP7320372A JP7320372A JPS5428072B2 JP S5428072 B2 JPS5428072 B2 JP S5428072B2 JP 7320372 A JP7320372 A JP 7320372A JP 7320372 A JP7320372 A JP 7320372A JP S5428072 B2 JPS5428072 B2 JP S5428072B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7320372A JPS5428072B2 (ja) | 1972-07-20 | 1972-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7320372A JPS5428072B2 (ja) | 1972-07-20 | 1972-07-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4931270A JPS4931270A (ja) | 1974-03-20 |
| JPS5428072B2 true JPS5428072B2 (ja) | 1979-09-13 |
Family
ID=13511340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7320372A Expired JPS5428072B2 (ja) | 1972-07-20 | 1972-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5428072B2 (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5820153B2 (ja) * | 1978-04-14 | 1983-04-21 | 日本電信電話株式会社 | 化合物半導体発光素子の製法 |
| JPS56162841A (en) * | 1980-05-20 | 1981-12-15 | Nippon Telegr & Teleph Corp <Ntt> | Forming method for insulating film of compound semiconductor |
| JP2533078B2 (ja) * | 1984-11-27 | 1996-09-11 | ソニー株式会社 | 不純物拡散方法 |
| JPH0740605B2 (ja) * | 1985-12-16 | 1995-05-01 | 松下電器産業株式会社 | 半導体装置の製造方法 |
| JP4275405B2 (ja) * | 2000-08-22 | 2009-06-10 | 三井化学株式会社 | 半導体レーザ素子の製造方法 |
-
1972
- 1972-07-20 JP JP7320372A patent/JPS5428072B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4931270A (ja) | 1974-03-20 |