JPS5427770A - Constant temperature clean bench - Google Patents

Constant temperature clean bench

Info

Publication number
JPS5427770A
JPS5427770A JP9357077A JP9357077A JPS5427770A JP S5427770 A JPS5427770 A JP S5427770A JP 9357077 A JP9357077 A JP 9357077A JP 9357077 A JP9357077 A JP 9357077A JP S5427770 A JPS5427770 A JP S5427770A
Authority
JP
Japan
Prior art keywords
constant temperature
clean bench
temperature clean
bench
constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9357077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS616299B2 (en:Method
Inventor
Takahito Hayakawa
Akira Kawamura
Takeshi Masuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP9357077A priority Critical patent/JPS5427770A/ja
Publication of JPS5427770A publication Critical patent/JPS5427770A/ja
Publication of JPS616299B2 publication Critical patent/JPS616299B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP9357077A 1977-08-04 1977-08-04 Constant temperature clean bench Granted JPS5427770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9357077A JPS5427770A (en) 1977-08-04 1977-08-04 Constant temperature clean bench

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9357077A JPS5427770A (en) 1977-08-04 1977-08-04 Constant temperature clean bench

Publications (2)

Publication Number Publication Date
JPS5427770A true JPS5427770A (en) 1979-03-02
JPS616299B2 JPS616299B2 (en:Method) 1986-02-25

Family

ID=14085904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9357077A Granted JPS5427770A (en) 1977-08-04 1977-08-04 Constant temperature clean bench

Country Status (1)

Country Link
JP (1) JPS5427770A (en:Method)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776851A (en) * 1980-10-31 1982-05-14 Watanabe Shoko:Kk Inspecting device for photoelectric element
JPS6077948U (ja) * 1983-11-02 1985-05-31 高砂熱学工業株式会社 移動式エンバイロメンタルチヤンバ−
JPS6127427A (ja) * 1984-07-17 1986-02-06 Hitachi Ltd 温調チヤンバ−
JPS6179136U (en:Method) * 1984-10-30 1986-05-27
JPS6191746U (en:Method) * 1984-11-19 1986-06-14
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer
JPH0298916A (ja) * 1988-10-06 1990-04-11 Takasago Thermal Eng Co Ltd クリーンチューブ装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0265897U (en:Method) * 1988-11-07 1990-05-17

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4423513Y1 (en:Method) * 1965-05-17 1969-10-03
JPS5121299A (ja) * 1974-08-16 1976-02-20 Dan Kagaku Kk Kukiseijosochi
JPS5125549U (en:Method) * 1974-08-16 1976-02-25
JPS5382041A (en) * 1976-12-27 1978-07-20 Hitachi Ltd Constant temperature control apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4423513Y1 (en:Method) * 1965-05-17 1969-10-03
JPS5121299A (ja) * 1974-08-16 1976-02-20 Dan Kagaku Kk Kukiseijosochi
JPS5125549U (en:Method) * 1974-08-16 1976-02-25
JPS5382041A (en) * 1976-12-27 1978-07-20 Hitachi Ltd Constant temperature control apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5776851A (en) * 1980-10-31 1982-05-14 Watanabe Shoko:Kk Inspecting device for photoelectric element
JPS6077948U (ja) * 1983-11-02 1985-05-31 高砂熱学工業株式会社 移動式エンバイロメンタルチヤンバ−
JPS6127427A (ja) * 1984-07-17 1986-02-06 Hitachi Ltd 温調チヤンバ−
JPS6179136U (en:Method) * 1984-10-30 1986-05-27
JPS6191746U (en:Method) * 1984-11-19 1986-06-14
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer
JPH0298916A (ja) * 1988-10-06 1990-04-11 Takasago Thermal Eng Co Ltd クリーンチューブ装置

Also Published As

Publication number Publication date
JPS616299B2 (en:Method) 1986-02-25

Similar Documents

Publication Publication Date Title
GB2010487B (en) Temperature measurement apparatus
JPS53139397A (en) Viginal probe
SG73383G (en) Pyridopyrimidines
JPS5416838A (en) Heater
JPS5458239A (en) Heater
JPS5457254A (en) Heater
GB2007371B (en) Temperature sensing apparatus
JPS5462641A (en) Thermostat
GB2008253B (en) Measuring tool
JPS5427770A (en) Constant temperature clean bench
JPS5416274A (en) Temperature sensing apparatus
JPS543922A (en) Heat responser
GB2009009B (en) Push benches
JPS5488174A (en) Thermocouple
JPS5412134A (en) Ff heater
GB1557465A (en) Transmissometer
DK174078A (da) Bindemiddel paa basis af polyvinylbutyrol til brug i fernis og maling
JPS5454686A (en) Twoocolor thermometer
JPS5462877A (en) Surface thermometer
JPS5435352A (en) Thermistor
JPS5466476A (en) Thermostat
JPS5473263A (en) Thermistor device
JPS5458073A (en) Twoocolor thermometer
JPS5389252A (en) Constant temperature device
JPS549673A (en) Probe