JPS5425665A - Reactor core tube - Google Patents
Reactor core tubeInfo
- Publication number
- JPS5425665A JPS5425665A JP9125377A JP9125377A JPS5425665A JP S5425665 A JPS5425665 A JP S5425665A JP 9125377 A JP9125377 A JP 9125377A JP 9125377 A JP9125377 A JP 9125377A JP S5425665 A JPS5425665 A JP S5425665A
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- reactor core
- exhaust
- grooves
- abnormity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To block the occurrence of abnormity on the semiconductor wafer surface diffused, by forming grooves near the exhaust grooves of a reactor core tube having gas inlet at one end and gas discharge outlet at another end and by containing the liquid material stored near the exhaust outlet in it.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9125377A JPS5425665A (en) | 1977-07-28 | 1977-07-28 | Reactor core tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9125377A JPS5425665A (en) | 1977-07-28 | 1977-07-28 | Reactor core tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5425665A true JPS5425665A (en) | 1979-02-26 |
Family
ID=14021249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9125377A Pending JPS5425665A (en) | 1977-07-28 | 1977-07-28 | Reactor core tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5425665A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0217832U (en) * | 1988-07-20 | 1990-02-06 | ||
JPH04252024A (en) * | 1991-01-28 | 1992-09-08 | Nec Yamagata Ltd | Semiconductor manufacturing apparatus |
-
1977
- 1977-07-28 JP JP9125377A patent/JPS5425665A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0217832U (en) * | 1988-07-20 | 1990-02-06 | ||
JPH04252024A (en) * | 1991-01-28 | 1992-09-08 | Nec Yamagata Ltd | Semiconductor manufacturing apparatus |
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