JPS52106786A - Gas collector - Google Patents

Gas collector

Info

Publication number
JPS52106786A
JPS52106786A JP2341876A JP2341876A JPS52106786A JP S52106786 A JPS52106786 A JP S52106786A JP 2341876 A JP2341876 A JP 2341876A JP 2341876 A JP2341876 A JP 2341876A JP S52106786 A JPS52106786 A JP S52106786A
Authority
JP
Japan
Prior art keywords
gas
gas collector
pressure
sample gas
collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2341876A
Other languages
Japanese (ja)
Other versions
JPS5821694B2 (en
Inventor
Teruo Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP2341876A priority Critical patent/JPS5821694B2/en
Publication of JPS52106786A publication Critical patent/JPS52106786A/en
Publication of JPS5821694B2 publication Critical patent/JPS5821694B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To conduct a sample gas connected in a gas collector to an analytical gauge through a gas outlet at almost a constant pressure and at the same time, arrange so that the pressure for sending out a sample gas may be changed according to pressure loss in a connected gas treatment equipment.
COPYRIGHT: (C)1977,JPO&Japio
JP2341876A 1976-03-04 1976-03-04 gas sampling device Expired JPS5821694B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2341876A JPS5821694B2 (en) 1976-03-04 1976-03-04 gas sampling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2341876A JPS5821694B2 (en) 1976-03-04 1976-03-04 gas sampling device

Publications (2)

Publication Number Publication Date
JPS52106786A true JPS52106786A (en) 1977-09-07
JPS5821694B2 JPS5821694B2 (en) 1983-05-02

Family

ID=12109939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2341876A Expired JPS5821694B2 (en) 1976-03-04 1976-03-04 gas sampling device

Country Status (1)

Country Link
JP (1) JPS5821694B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01109593U (en) * 1988-01-18 1989-07-25
JP2023070577A (en) 2021-11-09 2023-05-19 信越化学工業株式会社 Resist underlayer film material, patterning method, and method for forming resist underlayer film

Also Published As

Publication number Publication date
JPS5821694B2 (en) 1983-05-02

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