JPS53114743A - Etching method - Google Patents

Etching method

Info

Publication number
JPS53114743A
JPS53114743A JP2927677A JP2927677A JPS53114743A JP S53114743 A JPS53114743 A JP S53114743A JP 2927677 A JP2927677 A JP 2927677A JP 2927677 A JP2927677 A JP 2927677A JP S53114743 A JPS53114743 A JP S53114743A
Authority
JP
Japan
Prior art keywords
etching method
amoutn
shutting
reactor
deterioration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2927677A
Other languages
Japanese (ja)
Inventor
Hiroshi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2927677A priority Critical patent/JPS53114743A/en
Publication of JPS53114743A publication Critical patent/JPS53114743A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To decrease an amoutn of gas consumption, reduce a deterioration of a device and improve its safety property, by carrying out etching with shutting an inlet and an outlet after introduction of reactant gas into a reactor.
COPYRIGHT: (C)1978,JPO&Japio
JP2927677A 1977-03-18 1977-03-18 Etching method Pending JPS53114743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2927677A JPS53114743A (en) 1977-03-18 1977-03-18 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2927677A JPS53114743A (en) 1977-03-18 1977-03-18 Etching method

Publications (1)

Publication Number Publication Date
JPS53114743A true JPS53114743A (en) 1978-10-06

Family

ID=12271745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2927677A Pending JPS53114743A (en) 1977-03-18 1977-03-18 Etching method

Country Status (1)

Country Link
JP (1) JPS53114743A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014504805A (en) * 2011-01-24 2014-02-24 メムススター リミテッド Vapor etching of silicon dioxide with improved selectivity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014504805A (en) * 2011-01-24 2014-02-24 メムススター リミテッド Vapor etching of silicon dioxide with improved selectivity

Similar Documents

Publication Publication Date Title
JPS5439795A (en) Core output predictiting device for atomic power plant
JPS53114743A (en) Etching method
JPS5220388A (en) Furnace system for chemical reaction
JPS53122097A (en) Atomic power plant
JPS5394271A (en) Absorbing and removing method of nox in exhaust gas
JPS5424302A (en) Operating system of gas driven plant
JPS5388659A (en) Gas/liquid contact apparatus
JPS5426798A (en) Oxygen analyzer of magnetic pressure type
JPS5395879A (en) Operating method for silver-adsorbent filter
JPS5327799A (en) Treating system for gas waste in light water type reactor
JPS5391473A (en) Exhaust gas purifier
JPS51148118A (en) Exhaust gas purifier
JPS5368392A (en) Reactor gripper
JPS5422094A (en) Degassing device of core water of reactor
JPS5343151A (en) Handling and operation method of runner vane
JPS51143572A (en) An apparatus for treatment of exhaust gas of boilers, etc.
JPS52154995A (en) Rapid condensing device of steam in reactor
JPS5322996A (en) Emergency cooling device of reactor
JPS52101392A (en) Nuclear reactor
JPS53134767A (en) Promotion of oxidation of nitrogen monoxide in gas
JPS5241778A (en) Automatic control apparatus
JPS53132689A (en) Combustible gas concentration controller
JPS52154996A (en) Cooling device for spent fuel
JPS53112272A (en) Noncatalytic reduction denitration method
JPS5290163A (en) Method for treating aqueous solution containing formaldehyde