JPS5425391B1 - - Google Patents
Info
- Publication number
- JPS5425391B1 JPS5425391B1 JP152871A JP152871A JPS5425391B1 JP S5425391 B1 JPS5425391 B1 JP S5425391B1 JP 152871 A JP152871 A JP 152871A JP 152871 A JP152871 A JP 152871A JP S5425391 B1 JPS5425391 B1 JP S5425391B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB282970 | 1970-01-21 | ||
| GB3205970 | 1970-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5425391B1 true JPS5425391B1 (enrdf_load_stackoverflow) | 1979-08-28 |
Family
ID=26237761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP152871A Pending JPS5425391B1 (enrdf_load_stackoverflow) | 1970-01-21 | 1971-01-21 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3702398A (enrdf_load_stackoverflow) |
| JP (1) | JPS5425391B1 (enrdf_load_stackoverflow) |
| DE (1) | DE2102616A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2075739A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1284061A (enrdf_load_stackoverflow) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7204859A (enrdf_load_stackoverflow) * | 1972-04-12 | 1973-10-16 | ||
| US3801784A (en) * | 1972-04-14 | 1974-04-02 | Research Corp | Scanning electron microscope operating in area scan and angle scan modes |
| US3801792A (en) * | 1973-05-23 | 1974-04-02 | Bell Telephone Labor Inc | Electron beam apparatus |
| US4210806A (en) * | 1979-01-18 | 1980-07-01 | International Business Machines Corporation | High brightness electron probe beam and method |
| JPS5788659A (en) * | 1980-11-21 | 1982-06-02 | Jeol Ltd | Electron ray device |
| DE3636506A1 (de) * | 1986-10-27 | 1988-04-28 | Atomika Tech Physik Gmbh | Spiralabtastverfahren |
| US4780216A (en) * | 1986-11-19 | 1988-10-25 | Olin Corporation | Calcium hypochlorite sanitizing compositions |
| JPH0233843A (ja) * | 1988-07-25 | 1990-02-05 | Hitachi Ltd | 走査電子顕微鏡 |
| US4990779A (en) * | 1989-06-06 | 1991-02-05 | Nippon Steel Corporation | Method and apparatus for evaluating strains in crystals |
| JP2002217088A (ja) * | 2001-01-17 | 2002-08-02 | Nikon Corp | 荷電粒子線露光装置、荷電粒子線露光方法及び半導体デバイスの製造方法 |
| US7498564B2 (en) * | 2001-02-06 | 2009-03-03 | University Of Bristol Of Senate House | Resonant scanning near-field optical microscope |
| US7473887B2 (en) * | 2002-07-04 | 2009-01-06 | University Of Bristol Of Senate House | Resonant scanning probe microscope |
| US6930308B1 (en) * | 2002-07-11 | 2005-08-16 | Kla-Tencor Technologies Corporation | SEM profile and surface reconstruction using multiple data sets |
| US8129693B2 (en) | 2009-06-26 | 2012-03-06 | Carl Zeiss Nts Gmbh | Charged particle beam column and method of operating same |
| DE102009052392A1 (de) | 2009-11-09 | 2011-12-15 | Carl Zeiss Nts Gmbh | SACP-Verfahren und teilchenoptisches System zur Ausführung eines solchen Verfahrens |
| EP3343210B1 (en) * | 2016-12-30 | 2020-11-18 | IMEC vzw | Characterization of regions with different crystallinity in materials |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB832500A (en) * | 1955-12-12 | 1960-04-13 | Ass Elect Ind | Improvements relating to electron optical apparatus |
| DE1514706C2 (de) * | 1966-03-15 | 1975-11-06 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Ablenksystem für Korpuskularstrahlgeräte |
| FR2010485A1 (enrdf_load_stackoverflow) * | 1968-05-28 | 1970-02-20 | Jeol Ltd | |
| US3549883A (en) * | 1968-10-07 | 1970-12-22 | Gen Electric | Scanning electron microscope wherein an image is formed as a function of specimen current |
-
1970
- 1970-01-21 GB GB3205/70A patent/GB1284061A/en not_active Expired
-
1971
- 1971-01-20 FR FR7101733A patent/FR2075739A5/fr not_active Expired
- 1971-01-20 DE DE19712102616 patent/DE2102616A1/de active Pending
- 1971-01-21 US US108408A patent/US3702398A/en not_active Expired - Lifetime
- 1971-01-21 JP JP152871A patent/JPS5425391B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US3702398A (en) | 1972-11-07 |
| DE2102616A1 (de) | 1971-07-29 |
| FR2075739A5 (enrdf_load_stackoverflow) | 1971-10-08 |
| GB1284061A (en) | 1972-08-02 |