JPS5424697B2 - - Google Patents
Info
- Publication number
- JPS5424697B2 JPS5424697B2 JP10776674A JP10776674A JPS5424697B2 JP S5424697 B2 JPS5424697 B2 JP S5424697B2 JP 10776674 A JP10776674 A JP 10776674A JP 10776674 A JP10776674 A JP 10776674A JP S5424697 B2 JPS5424697 B2 JP S5424697B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10776674A JPS5424697B2 (cg-RX-API-DMAC7.html) | 1974-09-20 | 1974-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10776674A JPS5424697B2 (cg-RX-API-DMAC7.html) | 1974-09-20 | 1974-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5135639A JPS5135639A (cg-RX-API-DMAC7.html) | 1976-03-26 |
| JPS5424697B2 true JPS5424697B2 (cg-RX-API-DMAC7.html) | 1979-08-23 |
Family
ID=14467445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10776674A Expired JPS5424697B2 (cg-RX-API-DMAC7.html) | 1974-09-20 | 1974-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5424697B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5164433A (ja) * | 1974-11-30 | 1976-06-03 | Dainippon Printing Co Ltd | Shotsukokukakohoho |
| CA1071579A (en) * | 1976-09-13 | 1980-02-12 | Northern Telecom Limited | End point control in plasma etching |
| US4528438A (en) * | 1976-09-16 | 1985-07-09 | Northern Telecom Limited | End point control in plasma etching |
| JPS5448172A (en) * | 1977-09-24 | 1979-04-16 | Tokyo Ouka Kougiyou Kk | Plasma reaction processor |
| JPS54142143A (en) * | 1978-04-27 | 1979-11-06 | Anelva Corp | Dry type etching device |
| JPS54142144A (en) * | 1978-04-27 | 1979-11-06 | Anelva Corp | Control of dry etching |
| US4246060A (en) * | 1979-01-02 | 1981-01-20 | Motorola, Inc. | Plasma development process controller |
| JPS5685129U (cg-RX-API-DMAC7.html) * | 1979-11-28 | 1981-07-08 | ||
| JPS5690976A (en) * | 1979-12-21 | 1981-07-23 | Hitachi Ltd | Controlling method for dry etching |
| JPS5792510A (en) * | 1980-11-25 | 1982-06-09 | Oki Electric Ind Co Ltd | Etching of silicon nitride film |
| JPS59116366U (ja) * | 1983-01-28 | 1984-08-06 | 株式会社日立製作所 | エレベ−タ−ガイドレ−ルの清掃装置 |
| JP2554857B2 (ja) * | 1986-01-17 | 1996-11-20 | 東京エレクトロン 株式会社 | アツシング装置 |
| JPS6389684A (ja) * | 1986-10-01 | 1988-04-20 | Hitachi Electronics Eng Co Ltd | クリ−ニング終点検出方式 |
| JPS6324263U (cg-RX-API-DMAC7.html) * | 1987-07-14 | 1988-02-17 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS529353B2 (cg-RX-API-DMAC7.html) * | 1972-04-18 | 1977-03-15 |
-
1974
- 1974-09-20 JP JP10776674A patent/JPS5424697B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5135639A (cg-RX-API-DMAC7.html) | 1976-03-26 |