JPS5424046A - Reflecting mirror - Google Patents

Reflecting mirror

Info

Publication number
JPS5424046A
JPS5424046A JP8947677A JP8947677A JPS5424046A JP S5424046 A JPS5424046 A JP S5424046A JP 8947677 A JP8947677 A JP 8947677A JP 8947677 A JP8947677 A JP 8947677A JP S5424046 A JPS5424046 A JP S5424046A
Authority
JP
Japan
Prior art keywords
reflecting mirror
mirror metal
reflectance
durability
enhance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8947677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236201B2 (ru
Inventor
Noboru Sugawara
Susumu Ito
Sayoko Amano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP8947677A priority Critical patent/JPS5424046A/ja
Publication of JPS5424046A publication Critical patent/JPS5424046A/ja
Publication of JPS6236201B2 publication Critical patent/JPS6236201B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
  • Surface Treatment Of Optical Elements (AREA)
JP8947677A 1977-07-25 1977-07-25 Reflecting mirror Granted JPS5424046A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8947677A JPS5424046A (en) 1977-07-25 1977-07-25 Reflecting mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8947677A JPS5424046A (en) 1977-07-25 1977-07-25 Reflecting mirror

Publications (2)

Publication Number Publication Date
JPS5424046A true JPS5424046A (en) 1979-02-23
JPS6236201B2 JPS6236201B2 (ru) 1987-08-06

Family

ID=13971772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8947677A Granted JPS5424046A (en) 1977-07-25 1977-07-25 Reflecting mirror

Country Status (1)

Country Link
JP (1) JPS5424046A (ru)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58208703A (ja) * 1982-05-31 1983-12-05 Shigeo Kubo 多層膜反射鏡の製造方法
JPS5922003A (ja) * 1982-07-28 1984-02-04 Ricoh Co Ltd 高反射鏡の製造方法
JPS5926704A (ja) * 1982-08-05 1984-02-13 Hoya Corp 多層膜反射鏡
JPS62238504A (ja) * 1986-04-10 1987-10-19 Nachi Fujikoshi Corp レ−ザ−反射ミラ−
DE3936282A1 (de) * 1988-10-31 1990-05-03 Hoya Corp Mehrschichtiger oberflaechenreflektierspiegel
JP2005017543A (ja) * 2003-06-25 2005-01-20 Nikon Corp 紫外線レーザ光用ミラー及び光学系及び投影露光装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58208703A (ja) * 1982-05-31 1983-12-05 Shigeo Kubo 多層膜反射鏡の製造方法
JPS5922003A (ja) * 1982-07-28 1984-02-04 Ricoh Co Ltd 高反射鏡の製造方法
JPS5926704A (ja) * 1982-08-05 1984-02-13 Hoya Corp 多層膜反射鏡
JPS62238504A (ja) * 1986-04-10 1987-10-19 Nachi Fujikoshi Corp レ−ザ−反射ミラ−
DE3936282A1 (de) * 1988-10-31 1990-05-03 Hoya Corp Mehrschichtiger oberflaechenreflektierspiegel
JP2005017543A (ja) * 2003-06-25 2005-01-20 Nikon Corp 紫外線レーザ光用ミラー及び光学系及び投影露光装置

Also Published As

Publication number Publication date
JPS6236201B2 (ru) 1987-08-06

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