JPS5420828B2 - - Google Patents

Info

Publication number
JPS5420828B2
JPS5420828B2 JP5691072A JP5691072A JPS5420828B2 JP S5420828 B2 JPS5420828 B2 JP S5420828B2 JP 5691072 A JP5691072 A JP 5691072A JP 5691072 A JP5691072 A JP 5691072A JP S5420828 B2 JPS5420828 B2 JP S5420828B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5691072A
Other languages
Japanese (ja)
Other versions
JPS4918258A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5691072A priority Critical patent/JPS5420828B2/ja
Priority to GB2649673A priority patent/GB1426509A/en
Priority to US368520A priority patent/US3887835A/en
Publication of JPS4918258A publication Critical patent/JPS4918258A/ja
Publication of JPS5420828B2 publication Critical patent/JPS5420828B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source

Landscapes

  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Solid Thermionic Cathode (AREA)
JP5691072A 1972-06-09 1972-06-09 Expired JPS5420828B2 (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP5691072A JPS5420828B2 (enrdf_load_stackoverflow) 1972-06-09 1972-06-09
GB2649673A GB1426509A (en) 1972-06-09 1973-06-04 Field-emission electron guns
US368520A US3887835A (en) 1972-06-09 1973-06-11 Field emission electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5691072A JPS5420828B2 (enrdf_load_stackoverflow) 1972-06-09 1972-06-09

Publications (2)

Publication Number Publication Date
JPS4918258A JPS4918258A (enrdf_load_stackoverflow) 1974-02-18
JPS5420828B2 true JPS5420828B2 (enrdf_load_stackoverflow) 1979-07-25

Family

ID=13040599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5691072A Expired JPS5420828B2 (enrdf_load_stackoverflow) 1972-06-09 1972-06-09

Country Status (3)

Country Link
US (1) US3887835A (enrdf_load_stackoverflow)
JP (1) JPS5420828B2 (enrdf_load_stackoverflow)
GB (1) GB1426509A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5289453A (en) * 1976-01-21 1977-07-27 Hitachi Ltd Electric field radiation device
US4714600A (en) * 1984-12-24 1987-12-22 Mobil Oil Corporation Process for production of phosphoric acid from dry matrix by SO3 treatment and extraction
DE3930200A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Elektronenstrahlerzeuger, insbesondere fuer eine elektronenstrahlkanone
JPH06215714A (ja) * 1992-06-05 1994-08-05 Hitachi Ltd 電界放出型透過電子顕微鏡
JP3131339B2 (ja) * 1993-12-22 2001-01-31 三菱電機株式会社 陰極、陰極線管および陰極線管の作動方法
FR2792770A1 (fr) 1999-04-22 2000-10-27 Cit Alcatel Fonctionnement a haute pression d'une cathode froide a emission de champ
EP2365511B1 (en) * 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning
US20230154720A1 (en) * 2021-11-16 2023-05-18 Nuflare Technology, Inc. Method for estimating cathode lifetime of electron gun, and electron beam writing apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
JPS5323663B1 (enrdf_load_stackoverflow) * 1971-04-12 1978-07-15
DE2637107C2 (de) * 1976-08-18 1978-09-14 Danfoss A/S, Nordborg (Daenemark) Schaltungsanordnung zum Ermitteln physikalischer Größen strömender Medien nach der Ultraschallmethode

Also Published As

Publication number Publication date
US3887835A (en) 1975-06-03
GB1426509A (en) 1976-03-03
JPS4918258A (enrdf_load_stackoverflow) 1974-02-18

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