JPS5419755B2 - - Google Patents
Info
- Publication number
- JPS5419755B2 JPS5419755B2 JP12960976A JP12960976A JPS5419755B2 JP S5419755 B2 JPS5419755 B2 JP S5419755B2 JP 12960976 A JP12960976 A JP 12960976A JP 12960976 A JP12960976 A JP 12960976A JP S5419755 B2 JPS5419755 B2 JP S5419755B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- H10W10/012—
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- H10P14/61—
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- H10P50/644—
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- H10W10/13—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/973—Substrate orientation
Landscapes
- Element Separation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/634,571 US3998674A (en) | 1975-11-24 | 1975-11-24 | Method for forming recessed regions of thermally oxidized silicon and structures thereof utilizing anisotropic etching |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5264884A JPS5264884A (en) | 1977-05-28 |
| JPS5419755B2 true JPS5419755B2 (show.php) | 1979-07-17 |
Family
ID=24544344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51129609A Granted JPS5264884A (en) | 1975-11-24 | 1976-10-29 | Semiconductor device having embedded oxide region |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3998674A (show.php) |
| JP (1) | JPS5264884A (show.php) |
| CA (1) | CA1049156A (show.php) |
| DE (1) | DE2651423A1 (show.php) |
| FR (1) | FR2332618A1 (show.php) |
| GB (1) | GB1497199A (show.php) |
| IT (1) | IT1077022B (show.php) |
| NL (1) | NL7611523A (show.php) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4096619A (en) * | 1977-01-31 | 1978-06-27 | International Telephone & Telegraph Corporation | Semiconductor scribing method |
| US4278987A (en) * | 1977-10-17 | 1981-07-14 | Hitachi, Ltd. | Junction isolated IC with thick EPI portion having sides at least 20 degrees from (110) orientations |
| FR2408914A1 (fr) * | 1977-11-14 | 1979-06-08 | Radiotechnique Compelec | Dispositif semi-conducteur monolithique comprenant deux transistors complementaires et son procede de fabrication |
| US4118250A (en) * | 1977-12-30 | 1978-10-03 | International Business Machines Corporation | Process for producing integrated circuit devices by ion implantation |
| JPS60253268A (ja) * | 1984-05-29 | 1985-12-13 | Meidensha Electric Mfg Co Ltd | 半導体装置 |
| JPS6156446A (ja) * | 1984-08-28 | 1986-03-22 | Toshiba Corp | 半導体装置およびその製造方法 |
| JP3031117B2 (ja) * | 1993-06-02 | 2000-04-10 | 日産自動車株式会社 | 半導体装置の製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3728166A (en) * | 1967-01-11 | 1973-04-17 | Ibm | Semiconductor device fabrication method and product thereby |
| JPS507909B1 (show.php) * | 1969-08-04 | 1975-03-31 | ||
| JPS4844830B1 (show.php) * | 1969-08-21 | 1973-12-27 | Tokyo Shibaura Electric Co | |
| DE2120388A1 (de) * | 1970-04-28 | 1971-12-16 | Agency Ind Science Techn | Verbindungshalbleitervorrichtung |
| US3765969A (en) * | 1970-07-13 | 1973-10-16 | Bell Telephone Labor Inc | Precision etching of semiconductors |
| US3810796A (en) * | 1972-08-31 | 1974-05-14 | Texas Instruments Inc | Method of forming dielectrically isolated silicon diode array vidicon target |
| US3883948A (en) * | 1974-01-02 | 1975-05-20 | Signetics Corp | Semiconductor structure and method |
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1975
- 1975-11-24 US US05/634,571 patent/US3998674A/en not_active Expired - Lifetime
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1976
- 1976-09-17 IT IT27307/76A patent/IT1077022B/it active
- 1976-09-22 FR FR7629493A patent/FR2332618A1/fr active Granted
- 1976-10-19 NL NL7611523A patent/NL7611523A/xx not_active Application Discontinuation
- 1976-10-26 GB GB44532/76A patent/GB1497199A/en not_active Expired
- 1976-10-29 JP JP51129609A patent/JPS5264884A/ja active Granted
- 1976-11-11 DE DE19762651423 patent/DE2651423A1/de not_active Withdrawn
- 1976-11-24 CA CA76266526A patent/CA1049156A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7611523A (nl) | 1977-04-26 |
| FR2332618A1 (fr) | 1977-06-17 |
| FR2332618B1 (show.php) | 1978-06-30 |
| DE2651423A1 (de) | 1977-05-26 |
| JPS5264884A (en) | 1977-05-28 |
| CA1049156A (en) | 1979-02-20 |
| US3998674A (en) | 1976-12-21 |
| IT1077022B (it) | 1985-04-27 |
| GB1497199A (en) | 1978-01-05 |