JPS541645A - Production of light absorbing films such as of radiation detectors - Google Patents

Production of light absorbing films such as of radiation detectors

Info

Publication number
JPS541645A
JPS541645A JP6700277A JP6700277A JPS541645A JP S541645 A JPS541645 A JP S541645A JP 6700277 A JP6700277 A JP 6700277A JP 6700277 A JP6700277 A JP 6700277A JP S541645 A JPS541645 A JP S541645A
Authority
JP
Japan
Prior art keywords
light absorbing
production
absorbing films
radiation detectors
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6700277A
Other languages
Japanese (ja)
Inventor
Atsushi Abe
Ryoichi Takayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6700277A priority Critical patent/JPS541645A/en
Publication of JPS541645A publication Critical patent/JPS541645A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

PURPOSE:To produce metal black light absorbing films by an in-gas evaporation method with good reproducibility by measuring and controlling the coating weight of metal ultrafine particles per unit area to substrates.
JP6700277A 1977-06-06 1977-06-06 Production of light absorbing films such as of radiation detectors Pending JPS541645A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6700277A JPS541645A (en) 1977-06-06 1977-06-06 Production of light absorbing films such as of radiation detectors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6700277A JPS541645A (en) 1977-06-06 1977-06-06 Production of light absorbing films such as of radiation detectors

Publications (1)

Publication Number Publication Date
JPS541645A true JPS541645A (en) 1979-01-08

Family

ID=13332285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6700277A Pending JPS541645A (en) 1977-06-06 1977-06-06 Production of light absorbing films such as of radiation detectors

Country Status (1)

Country Link
JP (1) JPS541645A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131134A (en) * 1988-11-12 1990-05-18 Shinku Yakin Kk Producing equipment of ultrafine organic substance particle

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3737237A (en) * 1971-11-18 1973-06-05 Nasa Monitoring deposition of films
JPS4958850A (en) * 1972-10-05 1974-06-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3737237A (en) * 1971-11-18 1973-06-05 Nasa Monitoring deposition of films
JPS4958850A (en) * 1972-10-05 1974-06-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131134A (en) * 1988-11-12 1990-05-18 Shinku Yakin Kk Producing equipment of ultrafine organic substance particle

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