JPS54149585A - Manufacturing device for semiconductor device - Google Patents

Manufacturing device for semiconductor device

Info

Publication number
JPS54149585A
JPS54149585A JP5755178A JP5755178A JPS54149585A JP S54149585 A JPS54149585 A JP S54149585A JP 5755178 A JP5755178 A JP 5755178A JP 5755178 A JP5755178 A JP 5755178A JP S54149585 A JPS54149585 A JP S54149585A
Authority
JP
Japan
Prior art keywords
pure water
water
pure
stay
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5755178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS619734B2 (enrdf_load_stackoverflow
Inventor
Riichi Amano
Yoshitaka Harano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5755178A priority Critical patent/JPS54149585A/ja
Publication of JPS54149585A publication Critical patent/JPS54149585A/ja
Publication of JPS619734B2 publication Critical patent/JPS619734B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP5755178A 1978-05-17 1978-05-17 Manufacturing device for semiconductor device Granted JPS54149585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5755178A JPS54149585A (en) 1978-05-17 1978-05-17 Manufacturing device for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5755178A JPS54149585A (en) 1978-05-17 1978-05-17 Manufacturing device for semiconductor device

Publications (2)

Publication Number Publication Date
JPS54149585A true JPS54149585A (en) 1979-11-22
JPS619734B2 JPS619734B2 (enrdf_load_stackoverflow) 1986-03-25

Family

ID=13058923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5755178A Granted JPS54149585A (en) 1978-05-17 1978-05-17 Manufacturing device for semiconductor device

Country Status (1)

Country Link
JP (1) JPS54149585A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56106452U (enrdf_load_stackoverflow) * 1980-01-16 1981-08-19
JPS5728764U (enrdf_load_stackoverflow) * 1980-07-25 1982-02-15

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56106452U (enrdf_load_stackoverflow) * 1980-01-16 1981-08-19
JPS5728764U (enrdf_load_stackoverflow) * 1980-07-25 1982-02-15

Also Published As

Publication number Publication date
JPS619734B2 (enrdf_load_stackoverflow) 1986-03-25

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