JPS54148376A - Work position detector device - Google Patents
Work position detector deviceInfo
- Publication number
- JPS54148376A JPS54148376A JP5622078A JP5622078A JPS54148376A JP S54148376 A JPS54148376 A JP S54148376A JP 5622078 A JP5622078 A JP 5622078A JP 5622078 A JP5622078 A JP 5622078A JP S54148376 A JPS54148376 A JP S54148376A
- Authority
- JP
- Japan
- Prior art keywords
- douser
- wafer
- detector
- parallel
- reflectors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Wire Bonding (AREA)
Abstract
PURPOSE: To enhance the working efficiency by providing the object lens, douser and detector in that order right above the work stage and then installing a pair of prism areas or reflectors across the position of the douser to secure a viewfield for the detector in parallel to the diagonal corner part of the work.
CONSTITUTION: Object lens 3, douser 4 and detector 5 are provided on stage 1 of wafer 2, and a pair of reflector 6 and 7 are installed in parallel to optical axis O and across douser 4. The reflected light from wafer 2 is magnified through lens 3 to form an image on surface 5a and 5b via the reflectors. In this case, the center part of the wafer is shielded 4 from the light to obtain a magnified pattern whose corners 2a and 2b are put in parallel to each other on the diagonal line. As a result, the visual error is reduced to enhance the working efficiency.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5622078A JPS54148376A (en) | 1978-05-12 | 1978-05-12 | Work position detector device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5622078A JPS54148376A (en) | 1978-05-12 | 1978-05-12 | Work position detector device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54148376A true JPS54148376A (en) | 1979-11-20 |
Family
ID=13021012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5622078A Pending JPS54148376A (en) | 1978-05-12 | 1978-05-12 | Work position detector device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54148376A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6113930U (en) * | 1984-06-29 | 1986-01-27 | 日本電気株式会社 | Semiconductor device recognition device for bonding equipment |
-
1978
- 1978-05-12 JP JP5622078A patent/JPS54148376A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6113930U (en) * | 1984-06-29 | 1986-01-27 | 日本電気株式会社 | Semiconductor device recognition device for bonding equipment |
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