JPS54147887A - Humidity detecting element - Google Patents
Humidity detecting elementInfo
- Publication number
- JPS54147887A JPS54147887A JP5692778A JP5692778A JPS54147887A JP S54147887 A JPS54147887 A JP S54147887A JP 5692778 A JP5692778 A JP 5692778A JP 5692778 A JP5692778 A JP 5692778A JP S54147887 A JPS54147887 A JP S54147887A
- Authority
- JP
- Japan
- Prior art keywords
- sensitive part
- humidity
- film
- dielectric
- spaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 abstract 4
- 229910044991 metal oxide Inorganic materials 0.000 abstract 2
- 150000004706 metal oxides Chemical class 0.000 abstract 2
- 230000003647 oxidation Effects 0.000 abstract 2
- 238000007254 oxidation reaction Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 229910052735 hafnium Inorganic materials 0.000 abstract 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5692778A JPS54147887A (en) | 1978-05-12 | 1978-05-12 | Humidity detecting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5692778A JPS54147887A (en) | 1978-05-12 | 1978-05-12 | Humidity detecting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54147887A true JPS54147887A (en) | 1979-11-19 |
| JPS6151735B2 JPS6151735B2 (enrdf_load_stackoverflow) | 1986-11-10 |
Family
ID=13041125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5692778A Granted JPS54147887A (en) | 1978-05-12 | 1978-05-12 | Humidity detecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54147887A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024539063A (ja) * | 2021-10-26 | 2024-10-28 | アトラス コプコ エアーパワー，ナームローゼ フェンノートシャップ | 圧縮空気の露点を間接的に決定する方法及び装置 |
-
1978
- 1978-05-12 JP JP5692778A patent/JPS54147887A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024539063A (ja) * | 2021-10-26 | 2024-10-28 | アトラス コプコ エアーパワー，ナームローゼ フェンノートシャップ | 圧縮空気の露点を間接的に決定する方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6151735B2 (enrdf_load_stackoverflow) | 1986-11-10 |
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