JPS54143240A - Scanning optical system of thermography apparatus - Google Patents

Scanning optical system of thermography apparatus

Info

Publication number
JPS54143240A
JPS54143240A JP5082978A JP5082978A JPS54143240A JP S54143240 A JPS54143240 A JP S54143240A JP 5082978 A JP5082978 A JP 5082978A JP 5082978 A JP5082978 A JP 5082978A JP S54143240 A JPS54143240 A JP S54143240A
Authority
JP
Japan
Prior art keywords
scanning
orthogonal
directions
optical system
miniaturization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5082978A
Other languages
English (en)
Inventor
Yoshiro Uchikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP5082978A priority Critical patent/JPS54143240A/ja
Publication of JPS54143240A publication Critical patent/JPS54143240A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
JP5082978A 1978-04-28 1978-04-28 Scanning optical system of thermography apparatus Pending JPS54143240A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5082978A JPS54143240A (en) 1978-04-28 1978-04-28 Scanning optical system of thermography apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5082978A JPS54143240A (en) 1978-04-28 1978-04-28 Scanning optical system of thermography apparatus

Publications (1)

Publication Number Publication Date
JPS54143240A true JPS54143240A (en) 1979-11-08

Family

ID=12869645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5082978A Pending JPS54143240A (en) 1978-04-28 1978-04-28 Scanning optical system of thermography apparatus

Country Status (1)

Country Link
JP (1) JPS54143240A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151606A (ja) * 1984-12-20 1986-07-10 マグナボツクス・ガバーンメント・エンド・インダストリアル・エレクトロニクス・コンパニー 撮像装置
JPS61219805A (ja) * 1985-03-27 1986-09-30 Olympus Optical Co Ltd 表面形状測定器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151606A (ja) * 1984-12-20 1986-07-10 マグナボツクス・ガバーンメント・エンド・インダストリアル・エレクトロニクス・コンパニー 撮像装置
JPS61219805A (ja) * 1985-03-27 1986-09-30 Olympus Optical Co Ltd 表面形状測定器

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