JPS54140461A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS54140461A JPS54140461A JP4776778A JP4776778A JPS54140461A JP S54140461 A JPS54140461 A JP S54140461A JP 4776778 A JP4776778 A JP 4776778A JP 4776778 A JP4776778 A JP 4776778A JP S54140461 A JPS54140461 A JP S54140461A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- radiant rays
- heat treatment
- irradiation
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
Landscapes
- Die Bonding (AREA)
Abstract
PURPOSE: To ensure a quick performance of the heat treatment for stability in the state of the wafer and thus to increase the working efficiency by irradiating the radiant rays of a fixed amount on the semiconductor element region as well as onto the wafer formed on the electrode to carry out a large amount of process.
CONSTITUTION: The radiant rays in the amount of 1 × 1012 W 5 × 1014 e/cm2 are irradiated and with the irradiation energy of more than 0.5Me to the semiconductor element region as well as onto the wafer formed on the electrode. And in case the pellets split from the wafer which received irradiation of the radiant rays or the wafer itself undergo the pellent attachment, the heat treatment of a fixed time is given at the temperature of 365°C W 420°C under the state of the wafer and with irradiation of the radiant rays. Thus, the heat treatment time can be reduced, increasing an overall working efficiency.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4776778A JPS54140461A (en) | 1978-04-24 | 1978-04-24 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4776778A JPS54140461A (en) | 1978-04-24 | 1978-04-24 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54140461A true JPS54140461A (en) | 1979-10-31 |
Family
ID=12784515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4776778A Pending JPS54140461A (en) | 1978-04-24 | 1978-04-24 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54140461A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0472736A (en) * | 1990-07-13 | 1992-03-06 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
-
1978
- 1978-04-24 JP JP4776778A patent/JPS54140461A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0472736A (en) * | 1990-07-13 | 1992-03-06 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
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