JPS54133076A - Set system for pattern rotation location - Google Patents

Set system for pattern rotation location

Info

Publication number
JPS54133076A
JPS54133076A JP4032678A JP4032678A JPS54133076A JP S54133076 A JPS54133076 A JP S54133076A JP 4032678 A JP4032678 A JP 4032678A JP 4032678 A JP4032678 A JP 4032678A JP S54133076 A JPS54133076 A JP S54133076A
Authority
JP
Japan
Prior art keywords
electric signal
slope
image
straight line
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4032678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240723B2 (enrdf_load_stackoverflow
Inventor
Yukio Kenbo
Tomohiro Kuji
Hiroshi Makihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4032678A priority Critical patent/JPS54133076A/ja
Publication of JPS54133076A publication Critical patent/JPS54133076A/ja
Publication of JPS6240723B2 publication Critical patent/JPS6240723B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP4032678A 1978-04-07 1978-04-07 Set system for pattern rotation location Granted JPS54133076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4032678A JPS54133076A (en) 1978-04-07 1978-04-07 Set system for pattern rotation location

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4032678A JPS54133076A (en) 1978-04-07 1978-04-07 Set system for pattern rotation location

Publications (2)

Publication Number Publication Date
JPS54133076A true JPS54133076A (en) 1979-10-16
JPS6240723B2 JPS6240723B2 (enrdf_load_stackoverflow) 1987-08-29

Family

ID=12577475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4032678A Granted JPS54133076A (en) 1978-04-07 1978-04-07 Set system for pattern rotation location

Country Status (1)

Country Link
JP (1) JPS54133076A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5666234A (en) * 1979-11-02 1981-06-04 Canon Kk Measuring apparatus
JPS587822A (ja) * 1981-07-06 1983-01-17 Toshiba Corp 回転位置合せ装置
JPH05177129A (ja) * 1991-04-25 1993-07-20 Abb Patent Gmbh 表面処理方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05307919A (ja) * 1990-12-21 1993-11-19 Nippon Tungsten Co Ltd 電気接点

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5666234A (en) * 1979-11-02 1981-06-04 Canon Kk Measuring apparatus
JPS587822A (ja) * 1981-07-06 1983-01-17 Toshiba Corp 回転位置合せ装置
JPH05177129A (ja) * 1991-04-25 1993-07-20 Abb Patent Gmbh 表面処理方法

Also Published As

Publication number Publication date
JPS6240723B2 (enrdf_load_stackoverflow) 1987-08-29

Similar Documents

Publication Publication Date Title
JPS5330223A (en) Automaitc code reading unit
JPS5218132A (en) Binary circuit
JPS5360246A (en) Zoom lens
JPS54133076A (en) Set system for pattern rotation location
JPS52147430A (en) Focus detection device
JPS56779A (en) Pickup unit for display picture
JPS5589805A (en) Light processing device
JPS52116995A (en) Lapping grinder
JPS5550201A (en) Lens driving device
JPS5331151A (en) Automatic focusing device for microscope
JPS52127259A (en) Observing surface sharpe
JPS557649A (en) Photo encoder
JPS5316179A (en) Numerical control system
JPS53120120A (en) Motor drive control circuit
JPS5376058A (en) Direction controller
JPS5341711A (en) Driving control unit for control motor
JPS51133046A (en) High reduction rate objective lens
JPS527254A (en) Reader
JPS5369004A (en) Optical recorder-reproducer
JPS5384114A (en) Dc motor r.p.m. control
JPS5784411A (en) Focus detecting method
JPS52129407A (en) Automatic focusing device
JPS5348728A (en) Zoom lens
JPS5368211A (en) Magnetic recording tape
EP0366437A3 (en) Imaging device