JPS54131578A - Monitoring device for continuous film former - Google Patents

Monitoring device for continuous film former

Info

Publication number
JPS54131578A
JPS54131578A JP3925378A JP3925378A JPS54131578A JP S54131578 A JPS54131578 A JP S54131578A JP 3925378 A JP3925378 A JP 3925378A JP 3925378 A JP3925378 A JP 3925378A JP S54131578 A JPS54131578 A JP S54131578A
Authority
JP
Japan
Prior art keywords
film
sample
work
monitoring device
film former
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3925378A
Other languages
Japanese (ja)
Other versions
JPS5742153B2 (en
Inventor
Seiji Miyagawa
Yasuo Kurosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP3925378A priority Critical patent/JPS54131578A/en
Publication of JPS54131578A publication Critical patent/JPS54131578A/en
Publication of JPS5742153B2 publication Critical patent/JPS5742153B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:A monitoring device for continous film former which is capable of discriminating the quality of products by knowing the film condition of each layer, having a system in which an advance movement accompanying the advancement of work carrier and a feeding movement at each definite position are given to sample holder in order to select each sample at operating position in order. CONSTITUTION:When the work carrier 2 is advanced along the feed path 3, each work on each side is formed its film in the face of each of the film former 4, by which 4-layered film is formed for example to manufacture product. In this case, the sample holder 9 advances as the carrier 2 goes forward and at the same time is given one feed rotation each just before each definite position, whereby each sample 8 corresponding to each definite position is selected at the operating position of each transparent window 11 and covered with film by the device 4 at its position. Then it is transferred to non-operation position. Thus, if the film of each sample 8 is inspected, the film condition of each on work can be known.
JP3925378A 1978-04-05 1978-04-05 Monitoring device for continuous film former Granted JPS54131578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3925378A JPS54131578A (en) 1978-04-05 1978-04-05 Monitoring device for continuous film former

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3925378A JPS54131578A (en) 1978-04-05 1978-04-05 Monitoring device for continuous film former

Publications (2)

Publication Number Publication Date
JPS54131578A true JPS54131578A (en) 1979-10-12
JPS5742153B2 JPS5742153B2 (en) 1982-09-07

Family

ID=12547969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3925378A Granted JPS54131578A (en) 1978-04-05 1978-04-05 Monitoring device for continuous film former

Country Status (1)

Country Link
JP (1) JPS54131578A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5576064A (en) * 1978-11-30 1980-06-07 Fujitsu Ltd Monitor unit for continuous formation of multi-layer coating

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956364U (en) * 1982-10-06 1984-04-12 三菱自動車工業株式会社 Diesel engine EGR device
KR102334493B1 (en) 2020-02-19 2021-12-02 제이에프이 케미칼 가부시키가이샤 Carbon material for negative electrode of lithium ion secondary battery, manufacturing method thereof, and negative electrode and lithium ion secondary battery using same
EP3896758B1 (en) 2020-02-19 2023-08-23 JFE Chemical Corporation Negative electrode carbon material for lithium ion secondary battery, production method therefor, and negative electrode and lithium ion secondary battery using same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135679A (en) * 1974-09-21 1976-03-26 Ulvac Corp TASOSUMAKUKEISEISOCHINIOKERU MAKUATSUKANSHISOCHI
JPS5139583A (en) * 1974-10-02 1976-04-02 Ulvac Corp TASOSUMAKUKEISEISOCHI NIOKERU MAKUATSUKANSHISOCHI

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135679A (en) * 1974-09-21 1976-03-26 Ulvac Corp TASOSUMAKUKEISEISOCHINIOKERU MAKUATSUKANSHISOCHI
JPS5139583A (en) * 1974-10-02 1976-04-02 Ulvac Corp TASOSUMAKUKEISEISOCHI NIOKERU MAKUATSUKANSHISOCHI

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5576064A (en) * 1978-11-30 1980-06-07 Fujitsu Ltd Monitor unit for continuous formation of multi-layer coating

Also Published As

Publication number Publication date
JPS5742153B2 (en) 1982-09-07

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