JPS5135679A - TASOSUMAKUKEISEISOCHINIOKERU MAKUATSUKANSHISOCHI - Google Patents

TASOSUMAKUKEISEISOCHINIOKERU MAKUATSUKANSHISOCHI

Info

Publication number
JPS5135679A
JPS5135679A JP10832174A JP10832174A JPS5135679A JP S5135679 A JPS5135679 A JP S5135679A JP 10832174 A JP10832174 A JP 10832174A JP 10832174 A JP10832174 A JP 10832174A JP S5135679 A JPS5135679 A JP S5135679A
Authority
JP
Japan
Prior art keywords
tasosumakukeiseisochiniokeru
makuatsukanshisochi
tasosumakukeiseisochiniokeru makuatsukanshisochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10832174A
Other languages
Japanese (ja)
Other versions
JPS5340189B2 (en
Inventor
Kazuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP10832174A priority Critical patent/JPS5135679A/en
Publication of JPS5135679A publication Critical patent/JPS5135679A/en
Publication of JPS5340189B2 publication Critical patent/JPS5340189B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10832174A 1974-09-21 1974-09-21 TASOSUMAKUKEISEISOCHINIOKERU MAKUATSUKANSHISOCHI Granted JPS5135679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10832174A JPS5135679A (en) 1974-09-21 1974-09-21 TASOSUMAKUKEISEISOCHINIOKERU MAKUATSUKANSHISOCHI

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10832174A JPS5135679A (en) 1974-09-21 1974-09-21 TASOSUMAKUKEISEISOCHINIOKERU MAKUATSUKANSHISOCHI

Publications (2)

Publication Number Publication Date
JPS5135679A true JPS5135679A (en) 1976-03-26
JPS5340189B2 JPS5340189B2 (en) 1978-10-25

Family

ID=14481735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10832174A Granted JPS5135679A (en) 1974-09-21 1974-09-21 TASOSUMAKUKEISEISOCHINIOKERU MAKUATSUKANSHISOCHI

Country Status (1)

Country Link
JP (1) JPS5135679A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131578A (en) * 1978-04-05 1979-10-12 Ulvac Corp Monitoring device for continuous film former
JPS5576064A (en) * 1978-11-30 1980-06-07 Fujitsu Ltd Monitor unit for continuous formation of multi-layer coating
US5863379A (en) * 1993-07-15 1999-01-26 Matsushita Electric Industrial Co., Ltd. Multilayer film forming apparatus and film forming method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131578A (en) * 1978-04-05 1979-10-12 Ulvac Corp Monitoring device for continuous film former
JPS5742153B2 (en) * 1978-04-05 1982-09-07
JPS5576064A (en) * 1978-11-30 1980-06-07 Fujitsu Ltd Monitor unit for continuous formation of multi-layer coating
US5863379A (en) * 1993-07-15 1999-01-26 Matsushita Electric Industrial Co., Ltd. Multilayer film forming apparatus and film forming method

Also Published As

Publication number Publication date
JPS5340189B2 (en) 1978-10-25

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