JPS54124790A - Standard gas generating apparatus for calibration of gas component measuring instrument - Google Patents
Standard gas generating apparatus for calibration of gas component measuring instrumentInfo
- Publication number
- JPS54124790A JPS54124790A JP3216078A JP3216078A JPS54124790A JP S54124790 A JPS54124790 A JP S54124790A JP 3216078 A JP3216078 A JP 3216078A JP 3216078 A JP3216078 A JP 3216078A JP S54124790 A JPS54124790 A JP S54124790A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- chamber
- lead
- standard
- standard gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
PURPOSE: To enable desired standard gas to be obtained easily in a short time, by properly replacing and installing plastic films suited to the kind and concentration of gas into pressure and vacuum resistant gas permeation cell.
CONSTITUTION: A plastic film 4 to permeate gas is inserted into the junction of a pair of split members to constitute a gas permeation cell made of stainless steel, and the cell is divided into a gas lead-in chamber 3 one side and a gas dilution chamber of the other side 5. In order to generate standard gas, the system up to the lead-in chamber 3 is evacuated by means of a vacuum pump 7, and the material gas for standard gas is led into the lead-in chamber 3 until reaching the specified pressure. At the same time, while observing the flow meter 6, the diluted gas is passed into the gas dilution chamber 5 at a specified flow rate. The component gas permeates through the plastic film 4, and the flow rate of permeation comes to be constant gradually as the time elapses, so that a desired standard gas may be obtained.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3216078A JPS54124790A (en) | 1978-03-20 | 1978-03-20 | Standard gas generating apparatus for calibration of gas component measuring instrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3216078A JPS54124790A (en) | 1978-03-20 | 1978-03-20 | Standard gas generating apparatus for calibration of gas component measuring instrument |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54124790A true JPS54124790A (en) | 1979-09-27 |
JPS5752978B2 JPS5752978B2 (en) | 1982-11-10 |
Family
ID=12351172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3216078A Granted JPS54124790A (en) | 1978-03-20 | 1978-03-20 | Standard gas generating apparatus for calibration of gas component measuring instrument |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54124790A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4343176A (en) * | 1980-11-12 | 1982-08-10 | The United States Of America As Represented By The United States Department Of Energy | Long-life leak standard assembly |
US4663958A (en) * | 1985-02-09 | 1987-05-12 | Dragerwerk Aktiengesellschaft | Method for sensitizing and stabilizing the operating condition of a semiconductor gas sensor and a semiconductor gas sensor device therefor |
JPH01199133A (en) * | 1987-08-14 | 1989-08-10 | L'air Liquide | Gas generation apparatus and method |
US5452600A (en) * | 1993-09-29 | 1995-09-26 | Lockheed Idaho Technologies Company | Calibrated vapor generator source |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50160093A (en) * | 1974-06-07 | 1975-12-25 |
-
1978
- 1978-03-20 JP JP3216078A patent/JPS54124790A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50160093A (en) * | 1974-06-07 | 1975-12-25 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4343176A (en) * | 1980-11-12 | 1982-08-10 | The United States Of America As Represented By The United States Department Of Energy | Long-life leak standard assembly |
US4663958A (en) * | 1985-02-09 | 1987-05-12 | Dragerwerk Aktiengesellschaft | Method for sensitizing and stabilizing the operating condition of a semiconductor gas sensor and a semiconductor gas sensor device therefor |
JPH01199133A (en) * | 1987-08-14 | 1989-08-10 | L'air Liquide | Gas generation apparatus and method |
US5452600A (en) * | 1993-09-29 | 1995-09-26 | Lockheed Idaho Technologies Company | Calibrated vapor generator source |
Also Published As
Publication number | Publication date |
---|---|
JPS5752978B2 (en) | 1982-11-10 |
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