JPS54124790A - Standard gas generating apparatus for calibration of gas component measuring instrument - Google Patents

Standard gas generating apparatus for calibration of gas component measuring instrument

Info

Publication number
JPS54124790A
JPS54124790A JP3216078A JP3216078A JPS54124790A JP S54124790 A JPS54124790 A JP S54124790A JP 3216078 A JP3216078 A JP 3216078A JP 3216078 A JP3216078 A JP 3216078A JP S54124790 A JPS54124790 A JP S54124790A
Authority
JP
Japan
Prior art keywords
gas
chamber
lead
standard
standard gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3216078A
Other languages
Japanese (ja)
Other versions
JPS5752978B2 (en
Inventor
Akitsugu Ibusuki
Kazunari Imagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP3216078A priority Critical patent/JPS54124790A/en
Publication of JPS54124790A publication Critical patent/JPS54124790A/en
Publication of JPS5752978B2 publication Critical patent/JPS5752978B2/ja
Granted legal-status Critical Current

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Abstract

PURPOSE: To enable desired standard gas to be obtained easily in a short time, by properly replacing and installing plastic films suited to the kind and concentration of gas into pressure and vacuum resistant gas permeation cell.
CONSTITUTION: A plastic film 4 to permeate gas is inserted into the junction of a pair of split members to constitute a gas permeation cell made of stainless steel, and the cell is divided into a gas lead-in chamber 3 one side and a gas dilution chamber of the other side 5. In order to generate standard gas, the system up to the lead-in chamber 3 is evacuated by means of a vacuum pump 7, and the material gas for standard gas is led into the lead-in chamber 3 until reaching the specified pressure. At the same time, while observing the flow meter 6, the diluted gas is passed into the gas dilution chamber 5 at a specified flow rate. The component gas permeates through the plastic film 4, and the flow rate of permeation comes to be constant gradually as the time elapses, so that a desired standard gas may be obtained.
COPYRIGHT: (C)1979,JPO&Japio
JP3216078A 1978-03-20 1978-03-20 Standard gas generating apparatus for calibration of gas component measuring instrument Granted JPS54124790A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3216078A JPS54124790A (en) 1978-03-20 1978-03-20 Standard gas generating apparatus for calibration of gas component measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3216078A JPS54124790A (en) 1978-03-20 1978-03-20 Standard gas generating apparatus for calibration of gas component measuring instrument

Publications (2)

Publication Number Publication Date
JPS54124790A true JPS54124790A (en) 1979-09-27
JPS5752978B2 JPS5752978B2 (en) 1982-11-10

Family

ID=12351172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3216078A Granted JPS54124790A (en) 1978-03-20 1978-03-20 Standard gas generating apparatus for calibration of gas component measuring instrument

Country Status (1)

Country Link
JP (1) JPS54124790A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343176A (en) * 1980-11-12 1982-08-10 The United States Of America As Represented By The United States Department Of Energy Long-life leak standard assembly
US4663958A (en) * 1985-02-09 1987-05-12 Dragerwerk Aktiengesellschaft Method for sensitizing and stabilizing the operating condition of a semiconductor gas sensor and a semiconductor gas sensor device therefor
JPH01199133A (en) * 1987-08-14 1989-08-10 L'air Liquide Gas generation apparatus and method
US5452600A (en) * 1993-09-29 1995-09-26 Lockheed Idaho Technologies Company Calibrated vapor generator source

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160093A (en) * 1974-06-07 1975-12-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160093A (en) * 1974-06-07 1975-12-25

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343176A (en) * 1980-11-12 1982-08-10 The United States Of America As Represented By The United States Department Of Energy Long-life leak standard assembly
US4663958A (en) * 1985-02-09 1987-05-12 Dragerwerk Aktiengesellschaft Method for sensitizing and stabilizing the operating condition of a semiconductor gas sensor and a semiconductor gas sensor device therefor
JPH01199133A (en) * 1987-08-14 1989-08-10 L'air Liquide Gas generation apparatus and method
US5452600A (en) * 1993-09-29 1995-09-26 Lockheed Idaho Technologies Company Calibrated vapor generator source

Also Published As

Publication number Publication date
JPS5752978B2 (en) 1982-11-10

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