JPS54115682A - Wax temperature sensitive element - Google Patents
Wax temperature sensitive elementInfo
- Publication number
- JPS54115682A JPS54115682A JP2212978A JP2212978A JPS54115682A JP S54115682 A JPS54115682 A JP S54115682A JP 2212978 A JP2212978 A JP 2212978A JP 2212978 A JP2212978 A JP 2212978A JP S54115682 A JPS54115682 A JP S54115682A
- Authority
- JP
- Japan
- Prior art keywords
- needle
- membrane
- sensitive element
- wax
- temp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Temperature-Responsive Valves (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
PURPOSE: To provide a wax temp. sensitive element which can be worked with good accuracy over a long term by coating the surface of a needle and/or the surface of a flexible membrane adjacent to the needle with a substance with low coefficient of friction.
CONSTITUTION: Wax 1 is stored in cylindrical metal container 2, and flexible rubber membrane 3 having a bag-shaped protrusion at the central part is closely contacted to the upper side of container 2. Stainless steel needle 4 having both ends rounded is inserted into the central bag of membrane 3 so that needle 4 is vertically movable with the guide of O-ring 7 and needle support plate 8. The resulting temp. sensitive element is a conventional one. A wax temp. sensitive element of this invention is constituted by coating the surface of needle 4 and/or the surface of membrane 3 with Teflone film 9 with low coefficient of friction. Since coated needle 4 causes little friction with membrane 3 and slides smoothly, membrane 3 is not roughened and does not undergo a change in strength due to fatigue.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53022129A JPS5826535B2 (en) | 1978-03-01 | 1978-03-01 | wax thermosensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53022129A JPS5826535B2 (en) | 1978-03-01 | 1978-03-01 | wax thermosensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54115682A true JPS54115682A (en) | 1979-09-08 |
JPS5826535B2 JPS5826535B2 (en) | 1983-06-03 |
Family
ID=12074267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53022129A Expired JPS5826535B2 (en) | 1978-03-01 | 1978-03-01 | wax thermosensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5826535B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1066923A2 (en) * | 1999-07-09 | 2001-01-10 | Applied Materials, Inc. | Carrier head with a modified flexible membrane |
US11007619B2 (en) | 2008-12-12 | 2021-05-18 | Applied Materials, Inc. | Carrier head membrane with regions of different roughness |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54117424U (en) * | 1978-02-06 | 1979-08-17 |
-
1978
- 1978-03-01 JP JP53022129A patent/JPS5826535B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54117424U (en) * | 1978-02-06 | 1979-08-17 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1066923A2 (en) * | 1999-07-09 | 2001-01-10 | Applied Materials, Inc. | Carrier head with a modified flexible membrane |
EP1066923A3 (en) * | 1999-07-09 | 2003-08-06 | Applied Materials, Inc. | Carrier head with a modified flexible membrane |
US6855043B1 (en) | 1999-07-09 | 2005-02-15 | Applied Materials, Inc. | Carrier head with a modified flexible membrane |
US11007619B2 (en) | 2008-12-12 | 2021-05-18 | Applied Materials, Inc. | Carrier head membrane with regions of different roughness |
US11738421B2 (en) | 2008-12-12 | 2023-08-29 | Applied Materials, Inc. | Method of making carrier head membrane with regions of different roughness |
Also Published As
Publication number | Publication date |
---|---|
JPS5826535B2 (en) | 1983-06-03 |
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