JPS54115682A - Wax temperature sensitive element - Google Patents

Wax temperature sensitive element

Info

Publication number
JPS54115682A
JPS54115682A JP2212978A JP2212978A JPS54115682A JP S54115682 A JPS54115682 A JP S54115682A JP 2212978 A JP2212978 A JP 2212978A JP 2212978 A JP2212978 A JP 2212978A JP S54115682 A JPS54115682 A JP S54115682A
Authority
JP
Japan
Prior art keywords
needle
membrane
sensitive element
wax
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2212978A
Other languages
Japanese (ja)
Other versions
JPS5826535B2 (en
Inventor
Takeshi Takamaru
Mineo Kashiwatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP53022129A priority Critical patent/JPS5826535B2/en
Publication of JPS54115682A publication Critical patent/JPS54115682A/en
Publication of JPS5826535B2 publication Critical patent/JPS5826535B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Temperature-Responsive Valves (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

PURPOSE: To provide a wax temp. sensitive element which can be worked with good accuracy over a long term by coating the surface of a needle and/or the surface of a flexible membrane adjacent to the needle with a substance with low coefficient of friction.
CONSTITUTION: Wax 1 is stored in cylindrical metal container 2, and flexible rubber membrane 3 having a bag-shaped protrusion at the central part is closely contacted to the upper side of container 2. Stainless steel needle 4 having both ends rounded is inserted into the central bag of membrane 3 so that needle 4 is vertically movable with the guide of O-ring 7 and needle support plate 8. The resulting temp. sensitive element is a conventional one. A wax temp. sensitive element of this invention is constituted by coating the surface of needle 4 and/or the surface of membrane 3 with Teflone film 9 with low coefficient of friction. Since coated needle 4 causes little friction with membrane 3 and slides smoothly, membrane 3 is not roughened and does not undergo a change in strength due to fatigue.
COPYRIGHT: (C)1979,JPO&Japio
JP53022129A 1978-03-01 1978-03-01 wax thermosensor Expired JPS5826535B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53022129A JPS5826535B2 (en) 1978-03-01 1978-03-01 wax thermosensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53022129A JPS5826535B2 (en) 1978-03-01 1978-03-01 wax thermosensor

Publications (2)

Publication Number Publication Date
JPS54115682A true JPS54115682A (en) 1979-09-08
JPS5826535B2 JPS5826535B2 (en) 1983-06-03

Family

ID=12074267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53022129A Expired JPS5826535B2 (en) 1978-03-01 1978-03-01 wax thermosensor

Country Status (1)

Country Link
JP (1) JPS5826535B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1066923A2 (en) * 1999-07-09 2001-01-10 Applied Materials, Inc. Carrier head with a modified flexible membrane
US11007619B2 (en) 2008-12-12 2021-05-18 Applied Materials, Inc. Carrier head membrane with regions of different roughness

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54117424U (en) * 1978-02-06 1979-08-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54117424U (en) * 1978-02-06 1979-08-17

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1066923A2 (en) * 1999-07-09 2001-01-10 Applied Materials, Inc. Carrier head with a modified flexible membrane
EP1066923A3 (en) * 1999-07-09 2003-08-06 Applied Materials, Inc. Carrier head with a modified flexible membrane
US6855043B1 (en) 1999-07-09 2005-02-15 Applied Materials, Inc. Carrier head with a modified flexible membrane
US11007619B2 (en) 2008-12-12 2021-05-18 Applied Materials, Inc. Carrier head membrane with regions of different roughness
US11738421B2 (en) 2008-12-12 2023-08-29 Applied Materials, Inc. Method of making carrier head membrane with regions of different roughness

Also Published As

Publication number Publication date
JPS5826535B2 (en) 1983-06-03

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