JPS54115075A - Plasma etching method - Google Patents

Plasma etching method

Info

Publication number
JPS54115075A
JPS54115075A JP2308278A JP2308278A JPS54115075A JP S54115075 A JPS54115075 A JP S54115075A JP 2308278 A JP2308278 A JP 2308278A JP 2308278 A JP2308278 A JP 2308278A JP S54115075 A JPS54115075 A JP S54115075A
Authority
JP
Japan
Prior art keywords
plasma etching
etching method
plasma
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2308278A
Other languages
Japanese (ja)
Other versions
JPS6153848B2 (en
Inventor
Yoshihiro Kakimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP2308278A priority Critical patent/JPS54115075A/en
Publication of JPS54115075A publication Critical patent/JPS54115075A/en
Publication of JPS6153848B2 publication Critical patent/JPS6153848B2/ja
Granted legal-status Critical Current

Links

JP2308278A 1978-02-28 1978-02-28 Plasma etching method Granted JPS54115075A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2308278A JPS54115075A (en) 1978-02-28 1978-02-28 Plasma etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2308278A JPS54115075A (en) 1978-02-28 1978-02-28 Plasma etching method

Publications (2)

Publication Number Publication Date
JPS54115075A true JPS54115075A (en) 1979-09-07
JPS6153848B2 JPS6153848B2 (en) 1986-11-19

Family

ID=12100485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2308278A Granted JPS54115075A (en) 1978-02-28 1978-02-28 Plasma etching method

Country Status (1)

Country Link
JP (1) JPS54115075A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07211705A (en) * 1994-01-13 1995-08-11 Internatl Business Mach Corp <Ibm> Device for controlling non- uniformity of plasma and generation of plasma

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933250A (en) * 1982-07-23 1984-02-23 インペリアル・ケミカル・インダストリ−ズ・ピ−エルシ− Acylanilide, manufacture and antiandrogenic medicinal or veterinary composition
JPS5933251A (en) * 1982-07-21 1984-02-23 ユ−エスヴイ−・フア−マシユ−テイカル・コ−ポレ−シヨン Angiotensin converting enzyme inhibitive and diuretic compound

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933251A (en) * 1982-07-21 1984-02-23 ユ−エスヴイ−・フア−マシユ−テイカル・コ−ポレ−シヨン Angiotensin converting enzyme inhibitive and diuretic compound
JPS5933250A (en) * 1982-07-23 1984-02-23 インペリアル・ケミカル・インダストリ−ズ・ピ−エルシ− Acylanilide, manufacture and antiandrogenic medicinal or veterinary composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07211705A (en) * 1994-01-13 1995-08-11 Internatl Business Mach Corp <Ibm> Device for controlling non- uniformity of plasma and generation of plasma

Also Published As

Publication number Publication date
JPS6153848B2 (en) 1986-11-19

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