JPS54115075A - Plasma etching method - Google Patents
Plasma etching methodInfo
- Publication number
- JPS54115075A JPS54115075A JP2308278A JP2308278A JPS54115075A JP S54115075 A JPS54115075 A JP S54115075A JP 2308278 A JP2308278 A JP 2308278A JP 2308278 A JP2308278 A JP 2308278A JP S54115075 A JPS54115075 A JP S54115075A
- Authority
- JP
- Japan
- Prior art keywords
- plasma etching
- etching method
- plasma
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2308278A JPS54115075A (en) | 1978-02-28 | 1978-02-28 | Plasma etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2308278A JPS54115075A (en) | 1978-02-28 | 1978-02-28 | Plasma etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54115075A true JPS54115075A (en) | 1979-09-07 |
JPS6153848B2 JPS6153848B2 (en) | 1986-11-19 |
Family
ID=12100485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2308278A Granted JPS54115075A (en) | 1978-02-28 | 1978-02-28 | Plasma etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54115075A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07211705A (en) * | 1994-01-13 | 1995-08-11 | Internatl Business Mach Corp <Ibm> | Device for controlling non- uniformity of plasma and generation of plasma |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5933250A (en) * | 1982-07-23 | 1984-02-23 | インペリアル・ケミカル・インダストリ−ズ・ピ−エルシ− | Acylanilide, manufacture and antiandrogenic medicinal or veterinary composition |
JPS5933251A (en) * | 1982-07-21 | 1984-02-23 | ユ−エスヴイ−・フア−マシユ−テイカル・コ−ポレ−シヨン | Angiotensin converting enzyme inhibitive and diuretic compound |
-
1978
- 1978-02-28 JP JP2308278A patent/JPS54115075A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5933251A (en) * | 1982-07-21 | 1984-02-23 | ユ−エスヴイ−・フア−マシユ−テイカル・コ−ポレ−シヨン | Angiotensin converting enzyme inhibitive and diuretic compound |
JPS5933250A (en) * | 1982-07-23 | 1984-02-23 | インペリアル・ケミカル・インダストリ−ズ・ピ−エルシ− | Acylanilide, manufacture and antiandrogenic medicinal or veterinary composition |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07211705A (en) * | 1994-01-13 | 1995-08-11 | Internatl Business Mach Corp <Ibm> | Device for controlling non- uniformity of plasma and generation of plasma |
Also Published As
Publication number | Publication date |
---|---|
JPS6153848B2 (en) | 1986-11-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2026369B (en) | Plasma etching apparatus | |
JPS5528389A (en) | Surface etching method | |
GB2026394B (en) | Dry etching process using plasma | |
GB2026393B (en) | Dry etching process using plasma | |
GB2026396B (en) | Dry etching process using plasma | |
GB2026395B (en) | Dry etching process using plasma | |
JPS56126929A (en) | Plasma etching method | |
IE791864L (en) | Plasma etching | |
JPS54156828A (en) | Plasma separating method | |
JPS55119177A (en) | Silicon etching method | |
DE3163085D1 (en) | Plasma etching apparatus | |
JPS569372A (en) | Etching method | |
JPS5528388A (en) | Surface etching method | |
JPS54128285A (en) | Plasma etching method | |
GB2085809B (en) | Plasma-assisted etching process | |
JPS5658975A (en) | Plasma etching apparatus | |
AU541034B2 (en) | Etching process | |
JPS5589474A (en) | Chromium etching method | |
JPS5455174A (en) | Etching method | |
GB2026922B (en) | Plasma etching metal | |
JPS54118483A (en) | Plasma initiated polymerization method | |
JPS52114444A (en) | Plasma etching method | |
JPS5328378A (en) | Method of plasma etching | |
JPS5368642A (en) | Plasma etching method | |
JPS536239A (en) | Plasma etching method |