JPS54112087A - Grinding stone for wafer bevel - Google Patents
Grinding stone for wafer bevelInfo
- Publication number
- JPS54112087A JPS54112087A JP1923278A JP1923278A JPS54112087A JP S54112087 A JPS54112087 A JP S54112087A JP 1923278 A JP1923278 A JP 1923278A JP 1923278 A JP1923278 A JP 1923278A JP S54112087 A JPS54112087 A JP S54112087A
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- grinding stone
- grinding layer
- notch
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Abstract
PURPOSE: Rotating body of grinding stone is equipped with discontinued portion in its grinding layer. By doing so, ground tips of wafer is discharged from the discontinued portion in its grinding layer to the outside smoothly during the grinding stone rotation so as to reduce remarkably the clogging in grinding layer.
CONSTITUTION: Mild steel made rotating body 11 has a rotating part 12 which has some curvature in its inside and that the body 11 has a plural numbered profound notch 13 which is located right angle to a rotating surface. Then, a grinding layer 14 formed on the rotating surface 12 becomes discontinued by the notch 13. When semiconductor wafer is machined by the grinding stone for bevel thus formed, cutting tips of wafer can easily discharged outside through the notch 13 of the grinding stone during its rotation so that clogging in the grinding layer 14 and frequemcy of dressing can remarkably be reduced.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1923278A JPS54112087A (en) | 1978-02-22 | 1978-02-22 | Grinding stone for wafer bevel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1923278A JPS54112087A (en) | 1978-02-22 | 1978-02-22 | Grinding stone for wafer bevel |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54112087A true JPS54112087A (en) | 1979-09-01 |
Family
ID=11993628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1923278A Pending JPS54112087A (en) | 1978-02-22 | 1978-02-22 | Grinding stone for wafer bevel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54112087A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994004319A2 (en) * | 1992-08-19 | 1994-03-03 | Klaus Voigt | Grinding tool |
-
1978
- 1978-02-22 JP JP1923278A patent/JPS54112087A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994004319A2 (en) * | 1992-08-19 | 1994-03-03 | Klaus Voigt | Grinding tool |
WO1994004319A3 (en) * | 1992-08-19 | 1994-04-28 | Klaus Voigt | Grinding tool |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5429189A (en) | Abrasive wheel for glinding purpose | |
JPS54112087A (en) | Grinding stone for wafer bevel | |
JPS5429188A (en) | Abrasive wheel for grinding machine and method of producing the same | |
JPS5783320A (en) | Method of grinding trough of female screw | |
JPS5662753A (en) | Surface grinder | |
JPS5253594A (en) | Method of controlling grinding operation for internal grinding machine | |
JPS5351589A (en) | Apparatus for controlling truing and dressing | |
JPS55106762A (en) | Grinding method of glass side edge | |
JPS5741171A (en) | Grindstone for grinding and cutting | |
JPS55144953A (en) | Grinding method | |
JPS569172A (en) | Diamond grindstone for surface grinder | |
JPS51147091A (en) | Method for controlling grinding | |
JPS51140294A (en) | Apparatus for compenstating for wearing down in grinding machine | |
JPS5463487A (en) | Grinding | |
JPS55101358A (en) | Grinding machine | |
JPS5639865A (en) | Rotary grindstone | |
JPS563179A (en) | Forming dressor | |
JPS5389089A (en) | Method of dressing spherical surface grinder | |
JPS5339591A (en) | Method of grinding outer surface of circular-section workpiece | |
JPS56126576A (en) | Grinding method in dressing | |
JPS54131195A (en) | Grinding of multi-layer grinding wheels | |
JPS538896A (en) | Process for grinding spherical surface | |
JPS51143981A (en) | Method of simultaneously truing and dressing grindstone | |
JPS55120966A (en) | Grinding method | |
JPS55144951A (en) | Grinding method |