JPS54110171A - Vacuum apparatus - Google Patents

Vacuum apparatus

Info

Publication number
JPS54110171A
JPS54110171A JP1654578A JP1654578A JPS54110171A JP S54110171 A JPS54110171 A JP S54110171A JP 1654578 A JP1654578 A JP 1654578A JP 1654578 A JP1654578 A JP 1654578A JP S54110171 A JPS54110171 A JP S54110171A
Authority
JP
Japan
Prior art keywords
flowing quantity
outlet
allowable
gas
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1654578A
Other languages
Japanese (ja)
Inventor
Haruki Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1654578A priority Critical patent/JPS54110171A/en
Publication of JPS54110171A publication Critical patent/JPS54110171A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Control Of Fluid Pressure (AREA)

Abstract

PURPOSE:To prevent the capacity lowering of apparatus by mixing of different gas and to enable to discover vacuum leakage in early stage, by detecting the vacuum leakage by the opening degree of valve, at the above mentioned apparatus formed by piping connecting plural vacuum machinery. CONSTITUTION:U concentration plant is composed of the production apparatus 11, the collection apparatus 12, the exhaust apparatus 13, the piping 14 connecting the above apparatus and the data transaction apparatus 15 and pressure and temperature of outlet gas of the apparatus 12 are controlled at a fixed value. Outlet flowing quantity of the apparatus 12 is considered as QA because of QA>>QU regarding U gas component as QU, air component as QA in flowing quantity of outlet gas, on account of getting out inflow air by the damage of machinery etc. from the apparatus 12 without being collected. The allowable outlet flowing quantity Ql of the apparatus 12, that is, the allowable valve operation quantity m is determined, because the air allowable inflow quantity is Wl from the relation of the control valve operation quantity m and the flowing quantity Q, considering the changing width of the flowing quantity of the apparatus 11. Condition is kept m<ml in normal time.
JP1654578A 1978-02-17 1978-02-17 Vacuum apparatus Pending JPS54110171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1654578A JPS54110171A (en) 1978-02-17 1978-02-17 Vacuum apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1654578A JPS54110171A (en) 1978-02-17 1978-02-17 Vacuum apparatus

Publications (1)

Publication Number Publication Date
JPS54110171A true JPS54110171A (en) 1979-08-29

Family

ID=11919224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1654578A Pending JPS54110171A (en) 1978-02-17 1978-02-17 Vacuum apparatus

Country Status (1)

Country Link
JP (1) JPS54110171A (en)

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