JPS5410999A - Cleaning of single crystal wafer - Google Patents
Cleaning of single crystal waferInfo
- Publication number
- JPS5410999A JPS5410999A JP7637777A JP7637777A JPS5410999A JP S5410999 A JPS5410999 A JP S5410999A JP 7637777 A JP7637777 A JP 7637777A JP 7637777 A JP7637777 A JP 7637777A JP S5410999 A JPS5410999 A JP S5410999A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crystal wafer
- cleaning
- abrasives
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Inorganic Insulating Materials (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE: To remove impurities, e.g., abrasives, oil, metal dust, etc. with high efficiency by making it possible to clean the single crystal wafer with strong acid by using a cleaning process under a milder temperature change condition.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7637777A JPS5410999A (en) | 1977-06-27 | 1977-06-27 | Cleaning of single crystal wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7637777A JPS5410999A (en) | 1977-06-27 | 1977-06-27 | Cleaning of single crystal wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5410999A true JPS5410999A (en) | 1979-01-26 |
Family
ID=13603638
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7637777A Pending JPS5410999A (en) | 1977-06-27 | 1977-06-27 | Cleaning of single crystal wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5410999A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5856340A (en) * | 1981-09-30 | 1983-04-04 | Toshiba Corp | Purification of semiconductor wafer |
-
1977
- 1977-06-27 JP JP7637777A patent/JPS5410999A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5856340A (en) * | 1981-09-30 | 1983-04-04 | Toshiba Corp | Purification of semiconductor wafer |
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