JPS5410999A - Cleaning of single crystal wafer - Google Patents

Cleaning of single crystal wafer

Info

Publication number
JPS5410999A
JPS5410999A JP7637777A JP7637777A JPS5410999A JP S5410999 A JPS5410999 A JP S5410999A JP 7637777 A JP7637777 A JP 7637777A JP 7637777 A JP7637777 A JP 7637777A JP S5410999 A JPS5410999 A JP S5410999A
Authority
JP
Japan
Prior art keywords
single crystal
crystal wafer
cleaning
abrasives
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7637777A
Other languages
Japanese (ja)
Inventor
Shoji Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7637777A priority Critical patent/JPS5410999A/en
Publication of JPS5410999A publication Critical patent/JPS5410999A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Inorganic Insulating Materials (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE: To remove impurities, e.g., abrasives, oil, metal dust, etc. with high efficiency by making it possible to clean the single crystal wafer with strong acid by using a cleaning process under a milder temperature change condition.
COPYRIGHT: (C)1979,JPO&Japio
JP7637777A 1977-06-27 1977-06-27 Cleaning of single crystal wafer Pending JPS5410999A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7637777A JPS5410999A (en) 1977-06-27 1977-06-27 Cleaning of single crystal wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7637777A JPS5410999A (en) 1977-06-27 1977-06-27 Cleaning of single crystal wafer

Publications (1)

Publication Number Publication Date
JPS5410999A true JPS5410999A (en) 1979-01-26

Family

ID=13603638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7637777A Pending JPS5410999A (en) 1977-06-27 1977-06-27 Cleaning of single crystal wafer

Country Status (1)

Country Link
JP (1) JPS5410999A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856340A (en) * 1981-09-30 1983-04-04 Toshiba Corp Purification of semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856340A (en) * 1981-09-30 1983-04-04 Toshiba Corp Purification of semiconductor wafer

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